| Presentation | 2005/1/14 Nano-wiring Process based on Nano-insulation Bed Mikinori Suzuki, Shinzo Morita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Processes for nano-wiring circuit (inter-connection technology) with nano-meter level dimension were proposed. Nano-insulation beds as barrier free quantum device evaluation circuit have been presented, therefore nano-wiring circuit will be fabricated with using the bed system. 100nmL&S structure of electron beam resist with trench on n-type Si wafer was fabricated and Au was tried to fill in the trench by electro-plating using ethanol NaAuCl_4 was solved at 0.5atom%. Au was successfully plated on Si wafer through the 100 nm width patterns. Ultra fine wiring patterns of Au plating will be realized with using nano-insulating beds along the conductive lines. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | nano-insulation bed / nano-wiring / NaAuCl_4 / electro-plating |
| Paper # | OME2004-116 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2005/1/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nano-wiring Process based on Nano-insulation Bed |
| Sub Title (in English) | |
| Keyword(1) | nano-insulation bed |
| Keyword(2) | nano-wiring |
| Keyword(3) | NaAuCl_4 |
| Keyword(4) | electro-plating |
| 1st Author's Name | Mikinori Suzuki |
| 1st Author's Affiliation | Department of Electronic Information System, Graduate School of Engineering Nagoya University() |
| 2nd Author's Name | Shinzo Morita |
| 2nd Author's Affiliation | Department of Electronic Information System, Graduate School of Engineering Nagoya University |
| Date | 2005/1/14 |
| Paper # | OME2004-116 |
| Volume (vol) | vol.104 |
| Number (no) | 578 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |