| Presentation | 2004/11/18 Copper-fluorocarbon composite thin films by prepared by RF sputtering Satoru IWAMORI, Akihiro UEMURA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Poly(tetrafluoroethylene) (PTFE)-copper (Cu) composite thin films were sputtered onto glass slides and evaluated size distributions of the Cu particles in the composite thin films. The particle size in the composite thin film sputtered at a pressure of SmTorr was smaller than that in the composite thin film sputtered at a pressure of 40 mTorr. Pull strength between the PTFE or PTFE-Cu composite thin films and Cu substrates was evaluated. The pull strength of PTFE/PTFE-Cu composite/Cu laminate was higher than that of PTFE/Cu laminate. In addition, the pull strength of the laminate containing the PTFE-Cu composite thin film sputtered at a pressure of 8mTorr was higher than that of 40mTorr. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PTFE / Cu / Sputtering / distribution / pull strength |
| Paper # | OME2004-96 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
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| Conference Date | 2004/11/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Copper-fluorocarbon composite thin films by prepared by RF sputtering |
| Sub Title (in English) | |
| Keyword(1) | PTFE |
| Keyword(2) | Cu |
| Keyword(3) | Sputtering |
| Keyword(4) | distribution |
| Keyword(5) | pull strength |
| 1st Author's Name | Satoru IWAMORI |
| 1st Author's Affiliation | Department of Human Mechanical Engineering, Graduate School of Natural Science and Engineering() |
| 2nd Author's Name | Akihiro UEMURA |
| 2nd Author's Affiliation | Department of Human Mechanical Engineering, Graduate School of Natural Science and Engineering |
| Date | 2004/11/18 |
| Paper # | OME2004-96 |
| Volume (vol) | vol.104 |
| Number (no) | 453 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |