| Presentation | 2005/5/20 Growth of GaNAs by using atomic hydrogen generated by using RF-plasma : Growth of GaNAs by using atomic hydrogen and effect on GaInNAs/GaAs QW of RTA Kazuya MITO, Masayuki YAMAMORI, Hiroyasu ISHIKAWA, Takashi EGAWA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The effect on GaNAs of atomic H generated by using cracking cell is reported. In this experiment, we investigate the effect on GaNAs of atomic H generated by using RF-plasma. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CBE / GaNAs / GaInNAs / RTA / RF-plasma |
| Paper # | ED2005-57,CPM2005-49,SDM2005-57 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2005/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of GaNAs by using atomic hydrogen generated by using RF-plasma : Growth of GaNAs by using atomic hydrogen and effect on GaInNAs/GaAs QW of RTA |
| Sub Title (in English) | |
| Keyword(1) | CBE |
| Keyword(2) | GaNAs |
| Keyword(3) | GaInNAs |
| Keyword(4) | RTA |
| Keyword(5) | RF-plasma |
| 1st Author's Name | Kazuya MITO |
| 1st Author's Affiliation | Nagoya Institute Technology() |
| 2nd Author's Name | Masayuki YAMAMORI |
| 2nd Author's Affiliation | Nagoya Institute Technology |
| 3rd Author's Name | Hiroyasu ISHIKAWA |
| 3rd Author's Affiliation | Nagoya Institute Technology |
| 4th Author's Name | Takashi EGAWA |
| 4th Author's Affiliation | Nagoya Institute Technology |
| Date | 2005/5/20 |
| Paper # | ED2005-57,CPM2005-49,SDM2005-57 |
| Volume (vol) | vol.105 |
| Number (no) | 94 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |