Presentation | 2005/5/20 MOVPE of GaN on R-plane sapphire with high-growth rate Hiroko FURUKAWA, Yoshizane OKADOME, Yousuke TSUCHIYA, Akira HONSHIO, Michinobu TSUDA, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A-plane GaN was grown on R-Plane sapphire by MOVPE. Growth rate higher than 50μm/h was achieved. A-plane GaN thus obtained shows flat surface and high-crystalline quality. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | R-plane Sapphire / A-plane GaN / high-growth rate |
Paper # | ED2005-54,CPM2005-46,SDM2005-54 |
Date of Issue |
Conference Information | |
Committee | SDM |
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Conference Date | 2005/5/20(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | MOVPE of GaN on R-plane sapphire with high-growth rate |
Sub Title (in English) | |
Keyword(1) | R-plane Sapphire |
Keyword(2) | A-plane GaN |
Keyword(3) | high-growth rate |
1st Author's Name | Hiroko FURUKAWA |
1st Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
2nd Author's Name | Yoshizane OKADOME |
2nd Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
3rd Author's Name | Yousuke TSUCHIYA |
3rd Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
4th Author's Name | Akira HONSHIO |
4th Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
5th Author's Name | Michinobu TSUDA |
5th Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
6th Author's Name | Motoaki IWAYA |
6th Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
7th Author's Name | Satoshi KAMIYAMA |
7th Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
8th Author's Name | Hiroshi AMANO |
8th Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
9th Author's Name | Isamu AKASAKI |
9th Author's Affiliation | Faculty of Science and Technology, Meijo University, 21_ |
Date | 2005/5/20 |
Paper # | ED2005-54,CPM2005-46,SDM2005-54 |
Volume (vol) | vol.105 |
Number (no) | 94 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |