| Presentation | 2005/5/20 Polarity determination of InN using KOH solutions Daisuke MUTO, Tsutomu ARAKI, Hiroyuki NAOI, Yasushi NANISHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have succeeded in distinguishing the polarities of InN by wet etching using KOH solutions. In- and N-polar InN films were grown on (0001) sapphire substrates by RF-MBE. Each InN film was etched by a 10mol/l KOH solution for 20～120 min at room temperature. We found the N-polar InN was etched roughly and hexagonal pyramids surrounded by {10-1-1} facets appeared after longer term of etching. On the other hand, the In-polar InN was etched smoothly and hexagonal and dot type etch pits were observed after longer term of etching. These results confirm that the polarity of InN can be determined easily by wet etching using KOH solution. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InN / Polarity / Wet etching / KOH / etch pit density / RF-MBE |
| Paper # | ED2005-41,CPM2005-33,SDM2005-41 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2005/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Polarity determination of InN using KOH solutions |
| Sub Title (in English) | |
| Keyword(1) | InN |
| Keyword(2) | Polarity |
| Keyword(3) | Wet etching |
| Keyword(4) | KOH |
| Keyword(5) | etch pit density |
| Keyword(6) | RF-MBE |
| 1st Author's Name | Daisuke MUTO |
| 1st Author's Affiliation | Department of Photonics, Ritsumeikan University() |
| 2nd Author's Name | Tsutomu ARAKI |
| 2nd Author's Affiliation | Department of Photonics, Ritsumeikan University |
| 3rd Author's Name | Hiroyuki NAOI |
| 3rd Author's Affiliation | Center for Promotion of the COE Program, Ritsumeikan University |
| 4th Author's Name | Yasushi NANISHI |
| 4th Author's Affiliation | Department of Photonics, Ritsumeikan University |
| Date | 2005/5/20 |
| Paper # | ED2005-41,CPM2005-33,SDM2005-41 |
| Volume (vol) | vol.105 |
| Number (no) | 94 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |