| Presentation | 2005/3/4 A study for High Density MRAM vehicled on 0.18μm MRAM Hajime YAMAGISHI, Mitsuharu SHOJI, Ikuhiro YAMAMURA, Wataru OHTSUKA, Hiroyuki YAMADA, Motoaki NAKAMURA, Makoto MOTOYOSHI, Hiroshi KANO, Masanori HOSOMI, Tetsuya YAMAMOTO, Kazuhiro BESSYO, Hiroaki NARISAWA, Hideo HACHINO, Tsutomu SAGARA, Hironobu MORI, Chieko FUKUMOTO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we have developed RIE technique for MTJ, self align process for shrinking of cell size, clad wiring for decreasing a programming current. And we study to reduce the switching dispersion and improve 0/1 separation of Magnetic Tunnel Junction (MTJ) elements in order to realize high density MRAM. In study of the relation between MTJ shapes and switching distribution, we found the switching dispersion correlate with MTJ shape and the "Saturn" shaped MTJ has best switching behavior. As regards the reading characteristics, the combination of the optimized MTJ pattern and process makes 21.4 sigma separation between high and low resistance states. Also the toggle mode MRAM (Savtchenko switching mode) [1] is evaluated and its effectiveness for high speed programming is confirmed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MRAM / MTJ / switching characteristic / Self-Align-Process / MTJ shape / Toggle mode MRAM |
| Paper # | SDM2004-250 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2005/3/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A study for High Density MRAM vehicled on 0.18μm MRAM |
| Sub Title (in English) | |
| Keyword(1) | MRAM |
| Keyword(2) | MTJ |
| Keyword(3) | switching characteristic |
| Keyword(4) | Self-Align-Process |
| Keyword(5) | MTJ shape |
| Keyword(6) | Toggle mode MRAM |
| 1st Author's Name | Hajime YAMAGISHI |
| 1st Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation() |
| 2nd Author's Name | Mitsuharu SHOJI |
| 2nd Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation |
| 3rd Author's Name | Ikuhiro YAMAMURA |
| 3rd Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation |
| 4th Author's Name | Wataru OHTSUKA |
| 4th Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation |
| 5th Author's Name | Hiroyuki YAMADA |
| 5th Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation |
| 6th Author's Name | Motoaki NAKAMURA |
| 6th Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation |
| 7th Author's Name | Makoto MOTOYOSHI |
| 7th Author's Affiliation | Semiconductor Technology Development Group, Semiconductor Network Company, Sony Corporation |
| 8th Author's Name | Hiroshi KANO |
| 8th Author's Affiliation | Information Technologies Laboratories, Sony Corporation |
| 9th Author's Name | Masanori HOSOMI |
| 9th Author's Affiliation | Information Technologies Laboratories, Sony Corporation |
| 10th Author's Name | Tetsuya YAMAMOTO |
| 10th Author's Affiliation | Information Technologies Laboratories, Sony Corporation |
| 11th Author's Name | Kazuhiro BESSYO |
| 11th Author's Affiliation | Information Technologies Laboratories, Sony Corporation |
| 12th Author's Name | Hiroaki NARISAWA |
| 12th Author's Affiliation | Information Technologies Laboratories, Sony Corporation |
| 13th Author's Name | Hideo HACHINO |
| 13th Author's Affiliation | LSI Design Division, Sony Corporation |
| 14th Author's Name | Tsutomu SAGARA |
| 14th Author's Affiliation | LSI Design Division, Sony Corporation |
| 15th Author's Name | Hironobu MORI |
| 15th Author's Affiliation | LSI Design Division, Sony Corporation |
| 16th Author's Name | Chieko FUKUMOTO |
| 16th Author's Affiliation | LSI Design Division, Sony Corporation |
| Date | 2005/3/4 |
| Paper # | SDM2004-250 |
| Volume (vol) | vol.104 |
| Number (no) | 713 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |