| Presentation | 2005/1/24 Challenge of low-k materials for 130, 90, 65nm node interconnect technology and beyond H. Miyajima, K. Watanabe, K. Fujita, S. Ito, K. Tabuchi, T. Shimayama, K. Akiyama, T. Hachiya, K. Higashi, N. Nakamura, A. Kajita, N. Matsunaga, Y. Enomoto, R. Kanamura, M. Inohara, K. Honda, H. Kamijo, R. Nakata, H. Yano, N. Hayasaka, T. Hasegawa, S. Kadomura, H. Shibata, T. Yoda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to realize highly reliable low-k / Cu interconnects, optimum BEOL structures were developed for 130, 90 and 65 node logic devices respectively. For 65nm node BEOL structure, the conventional monolithic dual damascene (DD) structure was replaced by the hybrid-DD structure with PAr / SiOC stack films. It shows high extendibility to the next generation using newly developed technologies, such as eBeam cure and damage restoration techniques. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | low-k / ILD / BEOL / dual damascene / hybrid |
| Paper # | SDM2004-247 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2005/1/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Challenge of low-k materials for 130, 90, 65nm node interconnect technology and beyond |
| Sub Title (in English) | |
| Keyword(1) | low-k |
| Keyword(2) | ILD |
| Keyword(3) | BEOL |
| Keyword(4) | dual damascene |
| Keyword(5) | hybrid |
| 1st Author's Name | H. Miyajima |
| 1st Author's Affiliation | Semiconductor Company, Toshiba Corporation() |
| 2nd Author's Name | K. Watanabe |
| 2nd Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 3rd Author's Name | K. Fujita |
| 3rd Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 4th Author's Name | S. Ito |
| 4th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 5th Author's Name | K. Tabuchi |
| 5th Author's Affiliation | Semiconductor Solutions Network Company, Sony Corporation |
| 6th Author's Name | T. Shimayama |
| 6th Author's Affiliation | Semiconductor Solutions Network Company, Sony Corporation |
| 7th Author's Name | K. Akiyama |
| 7th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 8th Author's Name | T. Hachiya |
| 8th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 9th Author's Name | K. Higashi |
| 9th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 10th Author's Name | N. Nakamura |
| 10th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 11th Author's Name | A. Kajita |
| 11th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 12th Author's Name | N. Matsunaga |
| 12th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 13th Author's Name | Y. Enomoto |
| 13th Author's Affiliation | Semiconductor Solutions Network Company, Sony Corporation |
| 14th Author's Name | R. Kanamura |
| 14th Author's Affiliation | Semiconductor Solutions Network Company, Sony Corporation |
| 15th Author's Name | M. Inohara |
| 15th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 16th Author's Name | K. Honda |
| 16th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 17th Author's Name | H. Kamijo |
| 17th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 18th Author's Name | R. Nakata |
| 18th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 19th Author's Name | H. Yano |
| 19th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 20th Author's Name | N. Hayasaka |
| 20th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 21th Author's Name | T. Hasegawa |
| 21th Author's Affiliation | Semiconductor Solutions Network Company, Sony Corporation |
| 22th Author's Name | S. Kadomura |
| 22th Author's Affiliation | Semiconductor Solutions Network Company, Sony Corporation |
| 23th Author's Name | H. Shibata |
| 23th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| 24th Author's Name | T. Yoda |
| 24th Author's Affiliation | Semiconductor Company, Toshiba Corporation |
| Date | 2005/1/24 |
| Paper # | SDM2004-247 |
| Volume (vol) | vol.104 |
| Number (no) | 645 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |