| Presentation | 2004/12/9 Degradation of Low Temperature Poly-Si TFTs by Joule Heating Koji Kitajima, Yuta Sugawara, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Shinichiro Hashimoto, Yukihiro Morita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We analyzed thermal degradation in low temperature poly-S_1 thin film transistors using infrared thermal imaging microscope. Non-uniform distribution was observed in saturation region along the gate length Increase of temperature was remarkable in wide gate width, therefore large voltage shift was observed TFTs with different source and drain wiring indicated different temperature increase, subsequently, different reliability was confirmed Universal relationship was obtained independent of crystallinity of poly-S_1. This curve suggested that we should take the degradation of gate oxide such as electron traps into account In order to realize the future display, this method will be very effective to improve the reliability |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | low temperature poly-S_1 / Joule Heating / Vth shift / infrared thermal imaging scope |
| Paper # | SDM2004-204 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2004/12/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Degradation of Low Temperature Poly-Si TFTs by Joule Heating |
| Sub Title (in English) | |
| Keyword(1) | low temperature poly-S_1 |
| Keyword(2) | Joule Heating |
| Keyword(3) | Vth shift |
| Keyword(4) | infrared thermal imaging scope |
| 1st Author's Name | Koji Kitajima |
| 1st Author's Affiliation | Nara Institute of Science and Technology() |
| 2nd Author's Name | Yuta Sugawara |
| 2nd Author's Affiliation | Nara Institute of Science and Technology |
| 3rd Author's Name | Hiroshi Yano |
| 3rd Author's Affiliation | Nara Institute of Science and Technology |
| 4th Author's Name | Tomoaki Hatayama |
| 4th Author's Affiliation | Nara Institute of Science and Technology |
| 5th Author's Name | Yukiharu Uraoka |
| 5th Author's Affiliation | Nara Institute of Science and Technology |
| 6th Author's Name | Takashi Fuyuki |
| 6th Author's Affiliation | Nara Institute of Science and Technology |
| 7th Author's Name | Shinichiro Hashimoto |
| 7th Author's Affiliation | Matsushita Electric Ind Co.Ltd |
| 8th Author's Name | Yukihiro Morita |
| 8th Author's Affiliation | Matsushita Electric Ind Co.Ltd |
| Date | 2004/12/9 |
| Paper # | SDM2004-204 |
| Volume (vol) | vol.104 |
| Number (no) | 510 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |