| Presentation | 2005-01-17 60-MHz-Band Loosely-Coupled Microstrip Directional Coupler Takahiro HIRASHIMA, Ryoichi FUJII, Shuitsu FUJII, Satoshi TANAKA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed the 13.56 MHz band microstrip directional coupler used for the power measurement of the RF plasma generator for the semiconductor manufactured. The part of coupling section is compact size of about 1/250 wavelength, and this coupler has a high directivity of over 40 dB. In this report, a microstrip directional coupler corresponding to the 60 MHz band generator which comes to be used well recently. This coupler attains the good result of a return loss of 35.1 dB, an insertion loss of 0.0072 dB, a directivity of 38.6 dB at 43.0 dB coupled. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | RF Directional Coupler / Loosely-Coupled / Edge-Coupled Microstrip Line |
| Paper # | ED2004-208,MW2004-215 |
| Date of Issue |
| Conference Information | |
| Committee | MW |
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| Conference Date | 2005/1/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 60-MHz-Band Loosely-Coupled Microstrip Directional Coupler |
| Sub Title (in English) | |
| Keyword(1) | RF Directional Coupler |
| Keyword(2) | Loosely-Coupled |
| Keyword(3) | Edge-Coupled Microstrip Line |
| 1st Author's Name | Takahiro HIRASHIMA |
| 1st Author's Affiliation | Chugoku Polytechnic College() |
| 2nd Author's Name | Ryoichi FUJII |
| 2nd Author's Affiliation | Fukuyama Polytechnic College |
| 3rd Author's Name | Shuitsu FUJII |
| 3rd Author's Affiliation | ADTEC Plasma Technology Co., Ltd. |
| 4th Author's Name | Satoshi TANAKA |
| 4th Author's Affiliation | Faculty of Engineering, Fukuyama University |
| Date | 2005-01-17 |
| Paper # | ED2004-208,MW2004-215 |
| Volume (vol) | vol.104 |
| Number (no) | 551 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |