| Presentation | 2005/4/14 Development of Surface Acoustic Wave Mass Flow Sensor : Mass flow sensor using SAW delay line Koichi KOYAMA, Toru NOMURA, Atsushi SAITOH, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The flow sensor of the gases using the surface acoustic wave (SAW) is described. First, it proposed the measurement system that used SAW device was shown. Next, the outline and the characteristic of the SAW flow sensor used experiment were shown. The relation between the flow and the velocity change of the SAW was explained. In addition, the heat bias of the SAW flow device was defined, and the sensitivity of the flow sensor was measured in some bias point. Finally, the temperature characteristic of the gas flow sensor was measured. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | surface acoustic wave / flow sensor / delay line |
| Paper # | ED2005-8,SDM2005-8,OME2005-8 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2005/4/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Surface Acoustic Wave Mass Flow Sensor : Mass flow sensor using SAW delay line |
| Sub Title (in English) | |
| Keyword(1) | surface acoustic wave |
| Keyword(2) | flow sensor |
| Keyword(3) | delay line |
| 1st Author's Name | Koichi KOYAMA |
| 1st Author's Affiliation | Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology() |
| 2nd Author's Name | Toru NOMURA |
| 2nd Author's Affiliation | Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology |
| 3rd Author's Name | Atsushi SAITOH |
| 3rd Author's Affiliation | Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology |
| Date | 2005/4/14 |
| Paper # | ED2005-8,SDM2005-8,OME2005-8 |
| Volume (vol) | vol.105 |
| Number (no) | 18 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |