Presentation | 2004/12/9 Development of diamond electron source : Fabrication of sharp tip and electron emission properties for P-doped diamond films Yoshiki NISHIBAYASHI, Natsuo TATSUMI, Akihiko NAMBA, Takahiro IMAI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The authors have developed fabrication technique of diamond tips for electron emitter and have studied P-doped epitaxial film because the n-type film which have Fermi level at higher level is effective for electron emitter in comparison with p-type film. The authors report on electron emission properties from P-doped epitaxial emitter. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Diamond / Micro-fabrication / n-type film / Electron source |
Paper # | ED2004-192 |
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Conference Information | |
Committee | ED |
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Conference Date | 2004/12/9(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Development of diamond electron source : Fabrication of sharp tip and electron emission properties for P-doped diamond films |
Sub Title (in English) | |
Keyword(1) | Diamond |
Keyword(2) | Micro-fabrication |
Keyword(3) | n-type film |
Keyword(4) | Electron source |
1st Author's Name | Yoshiki NISHIBAYASHI |
1st Author's Affiliation | Semiconductor R&D Laboratories, Sumitomo Electric Industries, Ltd.() |
2nd Author's Name | Natsuo TATSUMI |
2nd Author's Affiliation | Semiconductor R&D Laboratories, Sumitomo Electric Industries, Ltd. |
3rd Author's Name | Akihiko NAMBA |
3rd Author's Affiliation | Semiconductor R&D Laboratories, Sumitomo Electric Industries, Ltd. |
4th Author's Name | Takahiro IMAI |
4th Author's Affiliation | Semiconductor R&D Laboratories, Sumitomo Electric Industries, Ltd. |
Date | 2004/12/9 |
Paper # | ED2004-192 |
Volume (vol) | vol.104 |
Number (no) | 519 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |