| Presentation | 2004/12/9 HfC coated field emitter array integrated with poly-Si TFT Masayoshi Nagao, Yutaka Sacho, Hisao Tanoue, Seigo Kanemaru, Junji Itoh, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The HfC-coated amorphous Si field emitter arrays (FEA) controlled by build-in poly-Si thin-film transistor (TFT) was proposed and fabricated. The FEA was fabricated at relatively low temperature using Ar ion sputter sharpening process so that low temperature poly-Si TFT process can be applied. The TFT structure is optimized for controlling field emission current. The lightly-doped drain (LDD) structured TFT with channel length of 50 μm and LDD offset length of 2 μm withstands high source drain voltage more than 40 V. Successful control of FEA by build-in TFT was demonstrated in vacuum chamber. Detailed fabrication process and emission control characteristics will be reported. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Vacuum nano-electronics / field emission display / field emitter array / hafnium carbide / TFT |
| Paper # | ED2004-191 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2004/12/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | HfC coated field emitter array integrated with poly-Si TFT |
| Sub Title (in English) | |
| Keyword(1) | Vacuum nano-electronics |
| Keyword(2) | field emission display |
| Keyword(3) | field emitter array |
| Keyword(4) | hafnium carbide |
| Keyword(5) | TFT |
| 1st Author's Name | Masayoshi Nagao |
| 1st Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST)() |
| 2nd Author's Name | Yutaka Sacho |
| 2nd Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 3rd Author's Name | Hisao Tanoue |
| 3rd Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 4th Author's Name | Seigo Kanemaru |
| 4th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 5th Author's Name | Junji Itoh |
| 5th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| Date | 2004/12/9 |
| Paper # | ED2004-191 |
| Volume (vol) | vol.104 |
| Number (no) | 519 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |