| Presentation | 2004/11/5 Reliability of 0.18 μm gate GaAs-MESFETs fabricated by i-line lithography process Yasuhiro TOSAKA, Masataka WATANABE, Daiji FUKUSHI, Hiroshi YANO, Shigeru NAKAJIMA, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A 0.18 μm GaAs-MESFET fabrication process with low cost and high uniformity was established by means of i-line lithography and ion-implantation technology. As the result of the investigation of 0.18 μm GaAs-MESFET using the high temperature accelerated life test, the activation energy of 1.54eV and mean time to failure (MTTF) of 2.4×10^5 hours at a junction temperature of 150℃ ware obtained. The sinking of Ti metal at the interface between the gate metal and GaAs substrate was revealed using the analysis of TEM and EDX. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MESFET / i-line lithography / reliability / activation energy / gate-sinking |
| Paper # | R2004-46,ED2004-159 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2004/11/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Reliability of 0.18 μm gate GaAs-MESFETs fabricated by i-line lithography process |
| Sub Title (in English) | |
| Keyword(1) | MESFET |
| Keyword(2) | i-line lithography |
| Keyword(3) | reliability |
| Keyword(4) | activation energy |
| Keyword(5) | gate-sinking |
| 1st Author's Name | Yasuhiro TOSAKA |
| 1st Author's Affiliation | Eudyna Devices Inc.() |
| 2nd Author's Name | Masataka WATANABE |
| 2nd Author's Affiliation | Eudyna Devices Inc. |
| 3rd Author's Name | Daiji FUKUSHI |
| 3rd Author's Affiliation | Eudyna Devices Inc. |
| 4th Author's Name | Hiroshi YANO |
| 4th Author's Affiliation | Eudyna Devices Inc. |
| 5th Author's Name | Shigeru NAKAJIMA |
| 5th Author's Affiliation | Eudyna Devices Inc. |
| Date | 2004/11/5 |
| Paper # | R2004-46,ED2004-159 |
| Volume (vol) | vol.104 |
| Number (no) | 428 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |