Presentation | 2005/5/19 Thermodynamic stability of InAlGaN thin films grown on GaN and InN Yoshihiro KANGAWA, Koichi KAKIMOTO, Tomonori ITO, Akinori KOUKITU, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We investigated thermodynamic stability of InAlGaN based on calculations of enthalpy of mixing using empirical interatomic potentials. Moreover, we studied influence of lattice constraint from bottom layers ((0001)GaN and (0001)InN layer) on the thermodynamic stability of the semiconductor thin films. The results suggest that maximum point of the enthalpy of mixing shift to In-rich (In-poor) side if InAlGaN thin film is on the GaN (InN) layer. These results suggest that the lattice constraint from bottom layer has a significant influence on thermodynamic stability of thin films. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InAlGaN / compositional instability / enthalpy of mixing / lattice constraint |
Paper # | ED2005-33,CPM2005-25,SDM2005-33 |
Date of Issue |
Conference Information | |
Committee | CPM |
---|---|
Conference Date | 2005/5/19(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Thermodynamic stability of InAlGaN thin films grown on GaN and InN |
Sub Title (in English) | |
Keyword(1) | InAlGaN |
Keyword(2) | compositional instability |
Keyword(3) | enthalpy of mixing |
Keyword(4) | lattice constraint |
1st Author's Name | Yoshihiro KANGAWA |
1st Author's Affiliation | Research Institute for Applied Mechanics, Kyushu University() |
2nd Author's Name | Koichi KAKIMOTO |
2nd Author's Affiliation | Research Institute for Applied Mechanics, Kyushu University |
3rd Author's Name | Tomonori ITO |
3rd Author's Affiliation | Faculty of Engineering, Mie University |
4th Author's Name | Akinori KOUKITU |
4th Author's Affiliation | Institute of Symbiotic Science and Technology, Tokyo University of A & T |
Date | 2005/5/19 |
Paper # | ED2005-33,CPM2005-25,SDM2005-33 |
Volume (vol) | vol.105 |
Number (no) | 91 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |