| Presentation | 2005/5/19 Substrates dependence of ZnO nanodots formation Kota OKAMATSU, Satoshi NAKAGAWA, Atsushi NAKAMURA, Toru AOKI, Jiro TEMMYO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The ZnO films and nanodots were grown on SiO_2/Si substrate, r-plane sapphire substrate, a-plane substrate by Remote Plasma Enhanced Metal Organic Chemical Vapor Deposition (RPE-MOCVD). Diethyl Zinc (DEZn) was used for a group-II source and oxygen gas was used for a group-VI source. The size dependency of ZnO nanodot were investigated by changing the substrates and substrate temperature. Crystallographic relationship between ZnO and substrates were investigated by XRD measurement. The ZnO dot size were depended on the substrate temperature and the growth rate. Optical property of ZnO nanodots was characterized by photoluminescence measurement. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | remote plasma MOCVD / ZnO / DEZn / nanodots |
| Paper # | ED2005-25,CPM2005-17,SDM2005-25 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Substrates dependence of ZnO nanodots formation |
| Sub Title (in English) | |
| Keyword(1) | remote plasma MOCVD |
| Keyword(2) | ZnO |
| Keyword(3) | DEZn |
| Keyword(4) | nanodots |
| 1st Author's Name | Kota OKAMATSU |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Satoshi NAKAGAWA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Atsushi NAKAMURA |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Toru AOKI |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Jiro TEMMYO |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2005/5/19 |
| Paper # | ED2005-25,CPM2005-17,SDM2005-25 |
| Volume (vol) | vol.105 |
| Number (no) | 91 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |