| Presentation | 2005/5/19 Characterization of amorphous carbon thin film synthesized by nitrogen radical and methane plasma sources Naoki KAMADA, Yasuhiko HAYASHI, Tetsuo SOGA, Takashi JIMBO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Conductivity of amorphous carbon (a-C) was successfully controlled by incorporation of nitrogen atoms using a double beam method (DBM), where both rf nitrogen radical and rf methane plasma sources were controlled separately to optimize the nitrogen incorporation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Amorphous carbon films / Nitrogen doping / Double beam method / Conductivity |
| Paper # | ED2005-21,CPM2005-13,SDM2005-21 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of amorphous carbon thin film synthesized by nitrogen radical and methane plasma sources |
| Sub Title (in English) | |
| Keyword(1) | Amorphous carbon films |
| Keyword(2) | Nitrogen doping |
| Keyword(3) | Double beam method |
| Keyword(4) | Conductivity |
| 1st Author's Name | Naoki KAMADA |
| 1st Author's Affiliation | Nagoya Institute of Technology() |
| 2nd Author's Name | Yasuhiko HAYASHI |
| 2nd Author's Affiliation | Nagoya Institute of Technology |
| 3rd Author's Name | Tetsuo SOGA |
| 3rd Author's Affiliation | Nagoya Institute of Technology |
| 4th Author's Name | Takashi JIMBO |
| 4th Author's Affiliation | Nagoya Institute of Technology |
| Date | 2005/5/19 |
| Paper # | ED2005-21,CPM2005-13,SDM2005-21 |
| Volume (vol) | vol.105 |
| Number (no) | 91 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |