| Presentation | 2005-01-27 Observation of MOSFETs using laser THz-emission microscope Masatsugu Yamashita, Kodo Kawase, Chiko Otani, Kiyoshi Nikawa, Masayoshi Tonouchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed and developed a laser THz emission microscope (LTEM) as a novel tool for inspecting electrical failures in semiconductor devices. LTEM provides an image reflecting the electric field distribution in LSI chip by scanning it with fs laser pulses. By comparing LTEM images of a normal chip and a damaged one, we observed the difference in the LTEM image near the damaged area. Here, we report the experimental result on non-biased MOSFETs embedded in a test element group. We found that the LTEM images of damaged samples changed from those of normal samples both under biased and non-biased condition. This indicates that the LTEM is a potential tool for inspecting electrical failures in circuits. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LSI / fault localization / THz emission / femtosecond laser |
| Paper # | CPM2004-160,ICD2004-205 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of MOSFETs using laser THz-emission microscope |
| Sub Title (in English) | |
| Keyword(1) | LSI |
| Keyword(2) | fault localization |
| Keyword(3) | THz emission |
| Keyword(4) | femtosecond laser |
| 1st Author's Name | Masatsugu Yamashita |
| 1st Author's Affiliation | RIKEN() |
| 2nd Author's Name | Kodo Kawase |
| 2nd Author's Affiliation | RIKEN |
| 3rd Author's Name | Chiko Otani |
| 3rd Author's Affiliation | RIKEN |
| 4th Author's Name | Kiyoshi Nikawa |
| 4th Author's Affiliation | NEC Electronics Corporation |
| 5th Author's Name | Masayoshi Tonouchi |
| 5th Author's Affiliation | Institute of Laser Engineering, Osaka University |
| Date | 2005-01-27 |
| Paper # | CPM2004-160,ICD2004-205 |
| Volume (vol) | vol.104 |
| Number (no) | 626 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |