| Presentation | 2005-01-27 Current challenges and the future of evaluation analysis technology of ULSI : The technology as a lifeline of LSI in the future Yoji Mashiko, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Current state of analysis-evaluation technology for ULSI devices is describes with some cases actually analyzed. And, the challenges of the analysis evaluation technology in the future progress of the ULSI devices is discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ULSI / analysis / evaluation / failure analysis / fault isolation / physical analysis |
| Paper # | CPM2004-159,ICD2004-204 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Current challenges and the future of evaluation analysis technology of ULSI : The technology as a lifeline of LSI in the future |
| Sub Title (in English) | |
| Keyword(1) | ULSI |
| Keyword(2) | analysis |
| Keyword(3) | evaluation |
| Keyword(4) | failure analysis |
| Keyword(5) | fault isolation |
| Keyword(6) | physical analysis |
| 1st Author's Name | Yoji Mashiko |
| 1st Author's Affiliation | Production and Technology Unit, Renesas Technology Corp.() |
| Date | 2005-01-27 |
| Paper # | CPM2004-159,ICD2004-204 |
| Volume (vol) | vol.104 |
| Number (no) | 626 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |