| Presentation | 2005-01-27 Observation of completed LSI after building-in defect using laser-SQUID microscopy T. Sakai, K. Nikawa, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have been improving and evaluating this system. In this meeting, we report observation results of completed LSI after building-in defect using laser-SQUID microscopy. First, we took magnetic intensity and phase images from same kind of samples without building-in defects in same experimental condition. We got similar images from each samples. Secondary, we observed a sample that was made open-circuit by focused ion beam (FIB). Magnetic intensity image showed strong contrast at positions of built-in defects. The phase at opposite sides of built-in defects showed about 180-degree change. These results shows we can directly localize open interconnects using the scanning laser-SQUID microscope. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Scanning Laser-SQUID microscope / built-in defect / intensity image / phase image / Open-circuit localization |
| Paper # | CPM2004-158,ICD2004-203 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of completed LSI after building-in defect using laser-SQUID microscopy |
| Sub Title (in English) | |
| Keyword(1) | Scanning Laser-SQUID microscope |
| Keyword(2) | built-in defect |
| Keyword(3) | intensity image |
| Keyword(4) | phase image |
| Keyword(5) | Open-circuit localization |
| 1st Author's Name | T. Sakai |
| 1st Author's Affiliation | Test Analysis Technology Development Division, NEC Electronics Corporation() |
| 2nd Author's Name | K. Nikawa |
| 2nd Author's Affiliation | Test Analysis Technology Development Division, NEC Electronics Corporation |
| Date | 2005-01-27 |
| Paper # | CPM2004-158,ICD2004-203 |
| Volume (vol) | vol.104 |
| Number (no) | 626 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |