| Presentation | 2005-01-27 Analysis Method of LSI open failure point Yasumaro KOMIYA, Shuji KIKUCHI, Akira SHIMASE, Kazuya MUKOGAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For the purpose of locating an open-failure point in recent LSIs of higher integration, we propose an analysis technique using an alternating electric field to activate an open CMOS gate for triggering observable power supply current change. In this paper, our prototype diagnosis system and the evaluation results with an open failure TEG are introduced. As the result, for an open failure of the top wiring layer (M3), of the 2nd layer (M2), and of the bottom layer (M1), relevant power supply current change was detected and the technical validity of this diagnostic technique was confirmed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Failure Analysis / LSI / Electric Field / Open Failure |
| Paper # | CPM2004-155,ICD2004-200 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis Method of LSI open failure point |
| Sub Title (in English) | |
| Keyword(1) | Failure Analysis |
| Keyword(2) | LSI |
| Keyword(3) | Electric Field |
| Keyword(4) | Open Failure |
| 1st Author's Name | Yasumaro KOMIYA |
| 1st Author's Affiliation | Production Engineering Research Laboratory, Hitachi, Ltd() |
| 2nd Author's Name | Shuji KIKUCHI |
| 2nd Author's Affiliation | Production Engineering Research Laboratory, Hitachi, Ltd |
| 3rd Author's Name | Akira SHIMASE |
| 3rd Author's Affiliation | Production and Technology Unit, Renesas Technology Corp |
| 4th Author's Name | Kazuya MUKOGAWA |
| 4th Author's Affiliation | Production and Technology Unit, Renesas Technology Corp |
| Date | 2005-01-27 |
| Paper # | CPM2004-155,ICD2004-200 |
| Volume (vol) | vol.104 |
| Number (no) | 626 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |