Presentation | 2004/11/5 Evaluation of ZnO:Al thin films prepared by Atmospheric Chemical Vapor Deposition Taisuke OYANAGI, Kazuo JIMBO, Syunsuke SHINODA, Takeshi KOBAYASHI, Hironori KATAGIRI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | By using Atmospheric Chemical Vapor Deposition (A-CVD) technique, ZnO:Al thin films were fabricated successfully. In this deposition technique, a metal complex was used as a source material. The deposition was carried out at the substrate temperature of 550 ℃ for 42 minutes to obtain ZnO:Al thin films with the thickness of about 600 nm. It was confirmed that the surface of the films were quite smooth, the transmittance exceeded over 70 % in the visible wavelength region and the resistivity was in the order of 10^<-3> Ωcm. The preferred orientation to the (002) plane increased with increase in the substrate temperature. The resistivity decreased with decrease in the distance between the nozzle and the substrate. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Cu_2ZnSnS_4 / thin film solar cell device / window layer / chemical vapor deposition |
Paper # | CPM2004-137 |
Date of Issue |
Conference Information | |
Committee | CPM |
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Conference Date | 2004/11/5(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Evaluation of ZnO:Al thin films prepared by Atmospheric Chemical Vapor Deposition |
Sub Title (in English) | |
Keyword(1) | Cu_2ZnSnS_4 |
Keyword(2) | thin film solar cell device |
Keyword(3) | window layer |
Keyword(4) | chemical vapor deposition |
1st Author's Name | Taisuke OYANAGI |
1st Author's Affiliation | Advanced Engineering Course, Nagaoka National College of Technology() |
2nd Author's Name | Kazuo JIMBO |
2nd Author's Affiliation | Advanced Engineering Course, Nagaoka National College of Technology |
3rd Author's Name | Syunsuke SHINODA |
3rd Author's Affiliation | Advanced Engineering Course, Nagaoka National College of Technology |
4th Author's Name | Takeshi KOBAYASHI |
4th Author's Affiliation | Advanced Engineering Course, Nagaoka National College of Technology |
5th Author's Name | Hironori KATAGIRI |
5th Author's Affiliation | Advanced Engineering Course, Nagaoka National College of Technology |
Date | 2004/11/5 |
Paper # | CPM2004-137 |
Volume (vol) | vol.104 |
Number (no) | 426 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |