Presentation 2004/11/5
Evaluation of ZnO:Al thin films prepared by Atmospheric Chemical Vapor Deposition
Taisuke OYANAGI, Kazuo JIMBO, Syunsuke SHINODA, Takeshi KOBAYASHI, Hironori KATAGIRI,
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Abstract(in English) By using Atmospheric Chemical Vapor Deposition (A-CVD) technique, ZnO:Al thin films were fabricated successfully. In this deposition technique, a metal complex was used as a source material. The deposition was carried out at the substrate temperature of 550 ℃ for 42 minutes to obtain ZnO:Al thin films with the thickness of about 600 nm. It was confirmed that the surface of the films were quite smooth, the transmittance exceeded over 70 % in the visible wavelength region and the resistivity was in the order of 10^<-3> Ωcm. The preferred orientation to the (002) plane increased with increase in the substrate temperature. The resistivity decreased with decrease in the distance between the nozzle and the substrate.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Cu_2ZnSnS_4 / thin film solar cell device / window layer / chemical vapor deposition
Paper # CPM2004-137
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Committee CPM
Conference Date 2004/11/5(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Evaluation of ZnO:Al thin films prepared by Atmospheric Chemical Vapor Deposition
Sub Title (in English)
Keyword(1) Cu_2ZnSnS_4
Keyword(2) thin film solar cell device
Keyword(3) window layer
Keyword(4) chemical vapor deposition
1st Author's Name Taisuke OYANAGI
1st Author's Affiliation Advanced Engineering Course, Nagaoka National College of Technology()
2nd Author's Name Kazuo JIMBO
2nd Author's Affiliation Advanced Engineering Course, Nagaoka National College of Technology
3rd Author's Name Syunsuke SHINODA
3rd Author's Affiliation Advanced Engineering Course, Nagaoka National College of Technology
4th Author's Name Takeshi KOBAYASHI
4th Author's Affiliation Advanced Engineering Course, Nagaoka National College of Technology
5th Author's Name Hironori KATAGIRI
5th Author's Affiliation Advanced Engineering Course, Nagaoka National College of Technology
Date 2004/11/5
Paper # CPM2004-137
Volume (vol) vol.104
Number (no) 426
Page pp.pp.-
#Pages 5
Date of Issue