| Presentation | 2004/11/5 Analysis of surface reaction during Si(001)-c(4×4) formation using MMS Masayuki HARASHIMA, Kanji YASUI, Masasuke TAKATA, Tadashi AKAHANE, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A surface structural change during initial stage of SiC growth on Si(001) using monomethylsilane (MMS) was analyzed. It was found that c(4×4) domains spread over the surface with an amount of carbon incorporation. After Si(001) surface was covered with c(4×4) structure, both reduction of the defects such as dimer vacancies and progress of step-bunching were observed. The simultaneous occurrence of these phenomena is a unique characteristic of the c(4×4) formation using MMS. These phenomena are considered to be important for the application of the c(4×4) surface to a template substrate for nano-structure. The structural change of c(4×4) to 2×n around SiC nuclei was also observed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Template substrate / Nano-structure / c(4×4) structure / Step-bunching / Dimer vacancy / SiC |
| Paper # | CPM2004-135 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2004/11/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of surface reaction during Si(001)-c(4×4) formation using MMS |
| Sub Title (in English) | |
| Keyword(1) | Template substrate |
| Keyword(2) | Nano-structure |
| Keyword(3) | c(4×4) structure |
| Keyword(4) | Step-bunching |
| Keyword(5) | Dimer vacancy |
| Keyword(6) | SiC |
| 1st Author's Name | Masayuki HARASHIMA |
| 1st Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology() |
| 2nd Author's Name | Kanji YASUI |
| 2nd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 3rd Author's Name | Masasuke TAKATA |
| 3rd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 4th Author's Name | Tadashi AKAHANE |
| 4th Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| Date | 2004/11/5 |
| Paper # | CPM2004-135 |
| Volume (vol) | vol.104 |
| Number (no) | 426 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |