Presentation | 2004/10/15 Fabrication, measurement, and numerical study of low propagation loss photonic crystal slab waveguides Eiichi KURAMOCHI, Stephen HUGHES, Akihiko SHINYA, Toshifumi WATANABE, Lora RAMMUNO, Masaya NOTOMI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Recently, we successfully fabricated a Air/Si/Air one-row-removed photonic crystal slab waveguide with very low propagation loss of 5dB/cm. In this communication, we report highly precise electron beam lithography and loss measurement of Si-based photonic crystal slab waveguides. We also report very good agreement between measured loss spectrum and calculated one based on our new photon Green function formalism. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Photonic Crystal / Waveguide / Propagation Loss / SOI / Electron Beam Lithography / Photon Green Function |
Paper # | ED2004-146,CPM2004-120,LQE2004-84 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2004/10/15(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication, measurement, and numerical study of low propagation loss photonic crystal slab waveguides |
Sub Title (in English) | |
Keyword(1) | Photonic Crystal |
Keyword(2) | Waveguide |
Keyword(3) | Propagation Loss |
Keyword(4) | SOI |
Keyword(5) | Electron Beam Lithography |
Keyword(6) | Photon Green Function |
1st Author's Name | Eiichi KURAMOCHI |
1st Author's Affiliation | NTT Basic Research Laboratories, NTT Corporation() |
2nd Author's Name | Stephen HUGHES |
2nd Author's Affiliation | NTT Basic Research Laboratories, NTT Corporation |
3rd Author's Name | Akihiko SHINYA |
3rd Author's Affiliation | NTT Basic Research Laboratories, NTT Corporation |
4th Author's Name | Toshifumi WATANABE |
4th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
5th Author's Name | Lora RAMMUNO |
5th Author's Affiliation | Department of Physics, University of Ottawa |
6th Author's Name | Masaya NOTOMI |
6th Author's Affiliation | NTT Basic Research Laboratories, NTT Corporation |
Date | 2004/10/15 |
Paper # | ED2004-146,CPM2004-120,LQE2004-84 |
Volume (vol) | vol.104 |
Number (no) | 360 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |