Presentation 2004/10/15
Fabrication, measurement, and numerical study of low propagation loss photonic crystal slab waveguides
Eiichi KURAMOCHI, Stephen HUGHES, Akihiko SHINYA, Toshifumi WATANABE, Lora RAMMUNO, Masaya NOTOMI,
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Abstract(in English) Recently, we successfully fabricated a Air/Si/Air one-row-removed photonic crystal slab waveguide with very low propagation loss of 5dB/cm. In this communication, we report highly precise electron beam lithography and loss measurement of Si-based photonic crystal slab waveguides. We also report very good agreement between measured loss spectrum and calculated one based on our new photon Green function formalism.
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Keyword(in English) Photonic Crystal / Waveguide / Propagation Loss / SOI / Electron Beam Lithography / Photon Green Function
Paper # ED2004-146,CPM2004-120,LQE2004-84
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Committee CPM
Conference Date 2004/10/15(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication, measurement, and numerical study of low propagation loss photonic crystal slab waveguides
Sub Title (in English)
Keyword(1) Photonic Crystal
Keyword(2) Waveguide
Keyword(3) Propagation Loss
Keyword(4) SOI
Keyword(5) Electron Beam Lithography
Keyword(6) Photon Green Function
1st Author's Name Eiichi KURAMOCHI
1st Author's Affiliation NTT Basic Research Laboratories, NTT Corporation()
2nd Author's Name Stephen HUGHES
2nd Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
3rd Author's Name Akihiko SHINYA
3rd Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
4th Author's Name Toshifumi WATANABE
4th Author's Affiliation NTT Microsystem Integration Laboratories, NTT Corporation
5th Author's Name Lora RAMMUNO
5th Author's Affiliation Department of Physics, University of Ottawa
6th Author's Name Masaya NOTOMI
6th Author's Affiliation NTT Basic Research Laboratories, NTT Corporation
Date 2004/10/15
Paper # ED2004-146,CPM2004-120,LQE2004-84
Volume (vol) vol.104
Number (no) 360
Page pp.pp.-
#Pages 4
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