Presentation 2004/10/15
Fabrication and Application of One-Dimensional Photonic Crystal
Kazuhiko HOSOMI, Toshihiko FUKAMACHI, Hiroji YAMADA, Toshio KATSUYAMA, Yasuhiko ARAKAWA,
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Abstract(in English) One-dimensional (1D) photonic crystals composed of deeply etched silicon were developed, and their transmission characteristics were measured. Because of its simplicity, a ID photonic crystal is a promising structure for academic research as well as commercial applications. In particular, a planer-type device fabricated on a silicon wafer is considered to have many advantageous for various applications. The structure is made of a high-aspect-ratio silicon plate fabricated by dry etching. The thickness and the height of the silicon plates are respectively 300 nm and 10 μm. In the experimentally measured spectrum, the transmittance is obviously suppressed which is considered to correspond to the band gap. The suppressed value of transmittance was at least 30 dB. The experimental result agrees well with the calculation; therefore, it is concluded that this experiment confirmed the fundamental function of the proposed 1D-photonic-crystal structure.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Photonic Crystal / Band Gap / High Aspect Ratio / Dry Etching
Paper # ED2004-145,CPM2004-119,LQE2004-83
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Committee CPM
Conference Date 2004/10/15(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and Application of One-Dimensional Photonic Crystal
Sub Title (in English)
Keyword(1) Photonic Crystal
Keyword(2) Band Gap
Keyword(3) High Aspect Ratio
Keyword(4) Dry Etching
1st Author's Name Kazuhiko HOSOMI
1st Author's Affiliation NCRC, IIS, University of Tokyo:OITDA:Central Research Laboratory, Hitachi, Ltd.()
2nd Author's Name Toshihiko FUKAMACHI
2nd Author's Affiliation NCRC, IIS, University of Tokyo:OITDA:Central Research Laboratory, Hitachi, Ltd.
3rd Author's Name Hiroji YAMADA
3rd Author's Affiliation NCRC, IIS, University of Tokyo:OITDA:Central Research Laboratory, Hitachi, Ltd.
4th Author's Name Toshio KATSUYAMA
4th Author's Affiliation NCRC, IIS, University of Tokyo:OITDA
5th Author's Name Yasuhiko ARAKAWA
5th Author's Affiliation NCRC, IIS, University of Tokyo
Date 2004/10/15
Paper # ED2004-145,CPM2004-119,LQE2004-83
Volume (vol) vol.104
Number (no) 360
Page pp.pp.-
#Pages 6
Date of Issue