Presentation | 2004/10/14 Surface Stoichiometry Control of InN Grown by RF-MBE Using In-situ Spectroscopic Ellipsometry Masayoshi YOSHITANI, Koichiro AKASAKA, Song-Bek CHE, Xinqiang WANG, Yoshihiro ISHITANI, Akihiko YOSHIKAWA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In order to obtain a high quality InN film, higher temperature growth is preferable with considering decomposition temperature of InN, which is estimated to be about 600℃. Under this condition, a V/III ratio during the InN growth should be precisely controlled to keep the Stoichiometry condition. In this study, we investigated surface states of InN epitaxial layers by using the in-situ Spectroscopic ellipsometry (SE). Pseudo-dielectric function <ε> strongly depended on surface states and V/III ratios. This real time SE monitoring was very useful to control the surface state and to obtain high quality and thick (over 5 μm) InN crystals. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InN / Spectroscopic ellipsometry / Surface Stoichiometry / RF-MBE |
Paper # | ED2004-129,CPM2004-103,LQE2004-67 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2004/10/14(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Surface Stoichiometry Control of InN Grown by RF-MBE Using In-situ Spectroscopic Ellipsometry |
Sub Title (in English) | |
Keyword(1) | InN |
Keyword(2) | Spectroscopic ellipsometry |
Keyword(3) | Surface Stoichiometry |
Keyword(4) | RF-MBE |
1st Author's Name | Masayoshi YOSHITANI |
1st Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University() |
2nd Author's Name | Koichiro AKASAKA |
2nd Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
3rd Author's Name | Song-Bek CHE |
3rd Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University:Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
4th Author's Name | Xinqiang WANG |
4th Author's Affiliation | Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
5th Author's Name | Yoshihiro ISHITANI |
5th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University:Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
6th Author's Name | Akihiko YOSHIKAWA |
6th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University:Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
Date | 2004/10/14 |
Paper # | ED2004-129,CPM2004-103,LQE2004-67 |
Volume (vol) | vol.104 |
Number (no) | 359 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |