Presentation 2004/10/14
InN films on Sapphire(0001) substrate grown by ECR-plasma assisted MBE
Tokuo YODO, Kiyonaga TAMOTO, Teruya SHIMADA, Hiroyuki NIGUCHI, Youhei FUJII, Takefumi MAOKA, Yoshiyuki HARADA,
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Abstract(in English) Hexagonal InN has been recently given much attention as a material for high-speed electron device because of the smallest effective electron mass, highest electron mobility and drift velocity of III-nitride semiconductors. Although the band-gap energy has been long believed to be 1.9 eV, it has been recently reported by many researchers that it was below 0.8 eV, accompanied by drastic improvement of growth techniques and reconsidered as a material of near-far infrared light emitting devices (LEDs). We have grown InN films on Si(111) substrates for developing low-cost full-color LED. However, it was difficult to estimate both band-gap energy and carrier concentration because of conductive Si substrate. In this technical report, we have grown InN films on insulating sapphire(0001) substrates and estimated the film characteristics.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Hexagonal InN / ECR-plasma assisted MBE / Sapphire(0001) substrate / In-polar plane
Paper # ED2004-128,CPM2004-102,LQE2004-66
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Committee CPM
Conference Date 2004/10/14(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) InN films on Sapphire(0001) substrate grown by ECR-plasma assisted MBE
Sub Title (in English)
Keyword(1) Hexagonal InN
Keyword(2) ECR-plasma assisted MBE
Keyword(3) Sapphire(0001) substrate
Keyword(4) In-polar plane
1st Author's Name Tokuo YODO
1st Author's Affiliation Electronics, Information and Communication Engineering, Osaka Institute of Technology()
2nd Author's Name Kiyonaga TAMOTO
2nd Author's Affiliation Electronics, Information and Communication Engineering, Osaka Institute of Technology
3rd Author's Name Teruya SHIMADA
3rd Author's Affiliation Electronics, Information and Communication Engineering, Osaka Institute of Technology
4th Author's Name Hiroyuki NIGUCHI
4th Author's Affiliation Electronics, Information and Communication Engineering, Osaka Institute of Technology
5th Author's Name Youhei FUJII
5th Author's Affiliation Electronics, Information and Communication Engineering, Osaka Institute of Technology
6th Author's Name Takefumi MAOKA
6th Author's Affiliation Electronics, Information and Communication Engineering, Osaka Institute of Technology
7th Author's Name Yoshiyuki HARADA
7th Author's Affiliation Applied Physics, Osaka Institute of Technology
Date 2004/10/14
Paper # ED2004-128,CPM2004-102,LQE2004-66
Volume (vol) vol.104
Number (no) 359
Page pp.pp.-
#Pages 6
Date of Issue