| Presentation | 2004/10/14 Study on InGaN ultra-thin films by high-resolution Rutherford backscattering spectrometry Satoshi KURAI, Hiroaki SAKUTA, Yoshitomo YAMANAKA, Tsunemasa TAGUCHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Thermal diffusion of In atoms in InGaN ultra-thin films of the thickness of 3 nm, which were grown by RF-MBE, was directly observed by the high-resolution Rutherford backscattering spectrometry. As the result, InGaN ultra-thin films decomposed by post-growth thermal annealing at 875℃ for lOmin, but remained by covering with GaN capping layers. However the decomposition of InGaN was suppressed by the capping layer, the thickness of InGaN with post-growth thermal annealing increased comparing with that before annealing; On the contrary, the thickness of the cap-GaN layer decreased. This result indicates that diffusion of In atoms occurred at GaN/InGaN interface. The diffusion coefficient was estimated to be approximately 3.8 × 10^<18> cm^2/s. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | high-resolution Rutherford backscattering spectrometry / RF-MBE / InGaN / thermal diffusion / diffusion coefficient |
| Paper # | ED2004-126,CPM2004-100,LQE2004-64 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on InGaN ultra-thin films by high-resolution Rutherford backscattering spectrometry |
| Sub Title (in English) | |
| Keyword(1) | high-resolution Rutherford backscattering spectrometry |
| Keyword(2) | RF-MBE |
| Keyword(3) | InGaN |
| Keyword(4) | thermal diffusion |
| Keyword(5) | diffusion coefficient |
| 1st Author's Name | Satoshi KURAI |
| 1st Author's Affiliation | Faculty of Engineering, Yamaguchi University() |
| 2nd Author's Name | Hiroaki SAKUTA |
| 2nd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 3rd Author's Name | Yoshitomo YAMANAKA |
| 3rd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 4th Author's Name | Tsunemasa TAGUCHI |
| 4th Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| Date | 2004/10/14 |
| Paper # | ED2004-126,CPM2004-100,LQE2004-64 |
| Volume (vol) | vol.104 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |