| Presentation | 2004/10/14 Mg-doping influence in AlGaN with high Al mole fraction Takashi Ohnishi, Akira Ishiga, Yuhuai Liu, Tomohiko Shibata, Mitsuhiro Tanaka, Hideto Miyake, Kazumasa Hiramatsu, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | p-type conductivity control of AlGaN needs Mg-doping, but it is difficult to fabricate low resistance p-type AlGaN because the higher Al mole fraction in AlGaN is, the larger Mg activation energy becomes. Therefore, Mg-doping influence of AlGaN with high Al mole fraction is not well understood. In this study, epitaxial AlN film was used as the substrate for the growth of Mg-doped AlGaN by low-pressure MOVPE. Crystallinity, optical property and other property were characterized. XRC-FWHM values of this experimental AlGaN increased with the flow of Cp_2Mg. And the emission peak concerned with deep level by Mg-doping was observed in CL spectra. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN / GaN / AlN / LP-MOVPE / Mg |
| Paper # | ED2004-124,CPM2004-98,LQE2004-62 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mg-doping influence in AlGaN with high Al mole fraction |
| Sub Title (in English) | |
| Keyword(1) | AlGaN |
| Keyword(2) | GaN |
| Keyword(3) | AlN |
| Keyword(4) | LP-MOVPE |
| Keyword(5) | Mg |
| 1st Author's Name | Takashi Ohnishi |
| 1st Author's Affiliation | Faculty of Eng., Mie University() |
| 2nd Author's Name | Akira Ishiga |
| 2nd Author's Affiliation | Faculty of Eng., Mie University |
| 3rd Author's Name | Yuhuai Liu |
| 3rd Author's Affiliation | Satellite Venture Business Lab., Mie University |
| 4th Author's Name | Tomohiko Shibata |
| 4th Author's Affiliation | NGK Insulators, Ltd. |
| 5th Author's Name | Mitsuhiro Tanaka |
| 5th Author's Affiliation | NGK Insulators, Ltd. |
| 6th Author's Name | Hideto Miyake |
| 6th Author's Affiliation | Faculty of Eng., Mie University |
| 7th Author's Name | Kazumasa Hiramatsu |
| 7th Author's Affiliation | Faculty of Eng., Mie University |
| Date | 2004/10/14 |
| Paper # | ED2004-124,CPM2004-98,LQE2004-62 |
| Volume (vol) | vol.104 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |