| Presentation | 2005/4/8 Hydrothermally deposited PZT film probe sensor using a near-field optical fiber probe Hiroshi Tamura, Minoru Kurosawa(Kuribayashi), Takehumi Kanda, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated a touch probe sensor, having a flat configuration and using a PZT thin film vibrator. This sensor is intended for use in high-precision surface shape measuring tools at low contact force, for example, Atomic Force Microscope ; AFM. The sensor consists of an oscillator vibrating in the longitudinal direction. According to our calculations higher sensitivity can be obtained by using longitudinal vibration than by using bending vibration. The vibration was excited and detected by a hydrothermally deposited PZT thin film device. To acuminate the tip of the sensor, we joined a cut near-field optical fiber to the tip of the sensor with epoxy resin. The length of the vibrator was 9.8 mm, and its resonance frequency was 284.93 kHz. When the driving voltage was 0.1 V at the resonance frequency, the vibration amplitude at the tip of the sensor was 60 nm. Using this sensor, we obtained a high-resolution grating image close to original surface shape. The sensitivity and the resolution were evaluated experimentally, with the vertical resolution estimated to be 4.0 nm. This sensor device will be effective for use in high-speed and high-resolution surface shape measuring tools to nano scale construction. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hydrothermal method / PZT film / Scanning Probe Microscope |
| Paper # | US2005-2 |
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| Committee | US |
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| Conference Date | 2005/4/8(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Hydrothermally deposited PZT film probe sensor using a near-field optical fiber probe |
| Sub Title (in English) | |
| Keyword(1) | hydrothermal method |
| Keyword(2) | PZT film |
| Keyword(3) | Scanning Probe Microscope |
| 1st Author's Name | Hiroshi Tamura |
| 1st Author's Affiliation | Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology() |
| 2nd Author's Name | Minoru Kurosawa(Kuribayashi) |
| 2nd Author's Affiliation | Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology |
| 3rd Author's Name | Takehumi Kanda |
| 3rd Author's Affiliation | Department og Systems Engineering, Faculty of Engineering, Okayama University |
| Date | 2005/4/8 |
| Paper # | US2005-2 |
| Volume (vol) | vol.105 |
| Number (no) | 5 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |