Presentation 2005/1/20
PZT thick film ultrasonic transducer for MHz frequency band fabricated by a hydrothermal poly crystal growth technique
Mutsuo Ishikawa, Minoru Kurosawa(Kuribayashi), Akito Endo, Shinichi Takeuchi,
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Abstract(in English) Thickness vibration mode operating ultrasonic transducer was fabricated by hydrothermal deposition technique of lead zirconate titanate polycrystalline thick film. This hydrothermal polycrystalline PZT thick film (HPTF-PZT) ultrasonic transducer was researched on the wide frequency band transmitting characteristics. The transducer had 50 μm thick PZT layer on 50μm thick titanium substrate in an active area of 8 mm×8 mm square. The experimental results showed the HPTF-PZT ultrasonic transducer could radiate a single pulse ultrasound which included the frequency range from 1 to 20 MHz within 20dB deviation. Additionally, this transducer could generate a 2MHz sawtooth ultrasonic wave with odd and even order harmonic components from 2^ to 11^ harmonics. These results indicated that the fabricated ultrasonic transducer has satisfactory wide band characteristics for MHz frequency range ultrasonic transmitter.
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Paper # US2004-88
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Conference Date 2005/1/20(1days)
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Language JPN
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Title (in English) PZT thick film ultrasonic transducer for MHz frequency band fabricated by a hydrothermal poly crystal growth technique
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1st Author's Name Mutsuo Ishikawa
1st Author's Affiliation Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology()
2nd Author's Name Minoru Kurosawa(Kuribayashi)
2nd Author's Affiliation Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology
3rd Author's Name Akito Endo
3rd Author's Affiliation Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology
4th Author's Name Shinichi Takeuchi
4th Author's Affiliation Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology
Date 2005/1/20
Paper # US2004-88
Volume (vol) vol.104
Number (no) 612
Page pp.pp.-
#Pages 6
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