Presentation 2005/2/3
Fabrication and characterization of YBCO SQUIDs for multi-channel magnetocardiograph
Akira Tsukamoto, Daisuke Suzuki, Yusuke Seki, Koichi Yokosawa, Akihiko Kandori, Kazuo Saitoh, Keiji Tsukada,
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Abstract(in English) We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SQUID / YBCO / fabrication process / magnetocardiogram
Paper # SCE2004-40
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Committee SCE
Conference Date 2005/2/3(1days)
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Registration To Superconductive Electronics (SCE)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and characterization of YBCO SQUIDs for multi-channel magnetocardiograph
Sub Title (in English)
Keyword(1) SQUID
Keyword(2) YBCO
Keyword(3) fabrication process
Keyword(4) magnetocardiogram
1st Author's Name Akira Tsukamoto
1st Author's Affiliation Advanced Research Laboratory, Hitachi, Ltd.()
2nd Author's Name Daisuke Suzuki
2nd Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
3rd Author's Name Yusuke Seki
3rd Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
4th Author's Name Koichi Yokosawa
4th Author's Affiliation Advanced Research Laboratory, Hitachi, Ltd.
5th Author's Name Akihiko Kandori
5th Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
6th Author's Name Kazuo Saitoh
6th Author's Affiliation Advanced Research Laboratory, Hitachi, Ltd.
7th Author's Name Keiji Tsukada
7th Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
Date 2005/2/3
Paper # SCE2004-40
Volume (vol) vol.104
Number (no) 655
Page pp.pp.-
#Pages 3
Date of Issue