Presentation | 2005/2/3 Fabrication and characterization of YBCO SQUIDs for multi-channel magnetocardiograph Akira Tsukamoto, Daisuke Suzuki, Yusuke Seki, Koichi Yokosawa, Akihiko Kandori, Kazuo Saitoh, Keiji Tsukada, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | SQUID / YBCO / fabrication process / magnetocardiogram |
Paper # | SCE2004-40 |
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Committee | SCE |
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Conference Date | 2005/2/3(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Registration To | Superconductive Electronics (SCE) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication and characterization of YBCO SQUIDs for multi-channel magnetocardiograph |
Sub Title (in English) | |
Keyword(1) | SQUID |
Keyword(2) | YBCO |
Keyword(3) | fabrication process |
Keyword(4) | magnetocardiogram |
1st Author's Name | Akira Tsukamoto |
1st Author's Affiliation | Advanced Research Laboratory, Hitachi, Ltd.() |
2nd Author's Name | Daisuke Suzuki |
2nd Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
3rd Author's Name | Yusuke Seki |
3rd Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
4th Author's Name | Koichi Yokosawa |
4th Author's Affiliation | Advanced Research Laboratory, Hitachi, Ltd. |
5th Author's Name | Akihiko Kandori |
5th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
6th Author's Name | Kazuo Saitoh |
6th Author's Affiliation | Advanced Research Laboratory, Hitachi, Ltd. |
7th Author's Name | Keiji Tsukada |
7th Author's Affiliation | Central Research Laboratory, Hitachi, Ltd. |
Date | 2005/2/3 |
Paper # | SCE2004-40 |
Volume (vol) | vol.104 |
Number (no) | 655 |
Page | pp.pp.- |
#Pages | 3 |
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