Presentation	2004/8/13 Corner Effect on body factor of short channel low-Fin FETs Toshiharu NAGUMO, Toshiro HIRAMOTO,
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Abstract(in English)	Impact of Fin-corner shape on body factor γ of low-Fin (tri-gate) FET in the both cases of highly-doped channel and undoped channel has been investigated by means of three-dimensional device simulation. Behavior of both threshold voltage (V_	) and γ depends on whether V_	is derived from on-state or off-state. In highly-doped low-Fin, γ derived from off-state characteristics (γ_) are strongly affected by corner shape, and increase in γ_ with reducing gate length (reverse short channel of γ) due to corner effect has been found in sharp corner device. Variation of off-current due to gate length fluctuation can be suppressed by applying negative substrate bias thanks to the reverse short channel effect of γ in highly-doped low-Fin with sharp corner. On the other hand, in undoped low-Fin, corner shape dependence is very weak and short channel characteristics become considerably worse than highly-doped case.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	FinFET / body effect / body factor / VTCMOS(variable threshold voltage CMOS) / corner effect
Paper #	SDM2004-145,ICD2004-87
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Conference Information
Committee	SDM
Conference Date	2004/8/13(1days)
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Paper Information
Registration To	Silicon Device and Materials (SDM)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	Corner Effect on body factor of short channel low-Fin FETs
Sub Title (in English)
Keyword(1)	FinFET
Keyword(2)	body effect
Keyword(3)	body factor
Keyword(4)	VTCMOS(variable threshold voltage CMOS)
Keyword(5)	corner effect
1st Author's Name	Toshiharu NAGUMO
1st Author's Affiliation	Institute of Industrial Science, University of Tokyo()
2nd Author's Name	Toshiro HIRAMOTO
2nd Author's Affiliation	Institute of Industrial Science, University of Tokyo
Date	2004/8/13
Paper #	SDM2004-145,ICD2004-87
Volume (vol)	vol.104
Number (no)	249
Page	pp.pp.-
#Pages	5
Date of Issue