| Presentation | 1995/10/24 Pulsed-laser-induced crystallization of fluorinated microcrystalline silicon films with different crystalline fraction H.S. Choi, K.H. Jang, B.H. Min, M.K. Han, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Laser-induced crystallization effects on fluorinated microcrystalline silicon films, in which the crystalline fraction is varied, have been investigated. Crystalline fractions of initial films, which has been evaluated from Raman data, is found to influence the laser-induced grain growth behavior. The gain growth is enhanced by the increase of surface melting and solidification times in the film with a critical initial crystalline fraction as well as by the fast lateral grain growth in the film with a relative high initial crystalline fraction. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | pulsed-laser / microcrystalline silicon / crystalline fraction / grain growth |
| Paper # | EID95-82 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Pulsed-laser-induced crystallization of fluorinated microcrystalline silicon films with different crystalline fraction |
| Sub Title (in English) | |
| Keyword(1) | pulsed-laser |
| Keyword(2) | microcrystalline silicon |
| Keyword(3) | crystalline fraction |
| Keyword(4) | grain growth |
| 1st Author's Name | H.S. Choi |
| 1st Author's Affiliation | Department of Electrical Engineering, Seoul National University() |
| 2nd Author's Name | K.H. Jang |
| 2nd Author's Affiliation | Department of Electrical Engineering, Seoul National University |
| 3rd Author's Name | B.H. Min |
| 3rd Author's Affiliation | Department of Electrical Engineering, Seoul National University |
| 4th Author's Name | M.K. Han |
| 4th Author's Affiliation | Department of Electrical Engineering, Seoul National University |
| Date | 1995/10/24 |
| Paper # | EID95-82 |
| Volume (vol) | vol.95 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |