| Presentation | 1995/10/24 Metal FEAs Fabricated with Local Oxidation of Polysilicon for Large-Area Display Applications II Hwan Kim, Chun Gyoo Lee, Jong Duk Lee, Sang Jik Kwon, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For large area displays, metal FEAs were fabricated with local oxidation of polysilicon. The field emitter arrays(FEAs) with 0.7-μm-diameter gate apertures were made, showing asymmetry of gate edge and roughness on gate surface. However, the electrical characteristics are well compared to the FEAs made from single crystal silicon. The anode current of 62.5 μA(0.1μA/tip) is measured at the gate bias of 52V for the 625-tip array, while the gate current was less than 0.3 % of the anode current. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | large-area display / polysilicon / LOCOS process / FEA |
| Paper # | EID95-71 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metal FEAs Fabricated with Local Oxidation of Polysilicon for Large-Area Display Applications |
| Sub Title (in English) | |
| Keyword(1) | large-area display |
| Keyword(2) | polysilicon |
| Keyword(3) | LOCOS process |
| Keyword(4) | FEA |
| 1st Author's Name | II Hwan Kim |
| 1st Author's Affiliation | Inter-University Semiconductor Research Center(ISRC) and Dept. of Electronics Engineering, Seoul Nat'l Univ.() |
| 2nd Author's Name | Chun Gyoo Lee |
| 2nd Author's Affiliation | Inter-University Semiconductor Research Center(ISRC) and Dept. of Electronics Engineering, Seoul Nat'l Univ. |
| 3rd Author's Name | Jong Duk Lee |
| 3rd Author's Affiliation | Inter-University Semiconductor Research Center(ISRC) and Dept. of Electronics Engineering, Seoul Nat'l Univ. |
| 4th Author's Name | Sang Jik Kwon |
| 4th Author's Affiliation | Dept. of Electronics Engineering, Kyungwon Univ. |
| Date | 1995/10/24 |
| Paper # | EID95-71 |
| Volume (vol) | vol.95 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |