Presentation | 1995/10/24 Field Emission Behavior of Diamond-like Carbon Films Kwang-Ryeol Lee, Kwang Yong Eun, Bokeon Jeong, Dong-Ryul Jeon, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Field emission behaviors from (nitrogenated) diamond-like carbon (DLC) films deposited on p-type Si (100) wafer by r.f. plasma assisted CVD method were investigated. Bias voltage of the substrate was varied from - 100V to -900V at a fixed pressure of l0mTorr. Onset field of the film deposited at the bias voltage of -100V was 10V/μm, while those of the films deposited at higher bias voltage were 20-24V/μm. The effective work functions of all DLC films were 0.05 eV. Nitrogen incorporation to DLC films enhanced the field emission behavior. Depending on the nitrogen source, the effective work functions ranged from 0.02 to 0.04eV. This behavior may be related to more efficient transport carriers from doped Si, through the film, to the emitting surface. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Field emission behavior / Diamond-like carbon film / plasma CVD / Nitrogenated diamond-like carbon film |
Paper # | EID95-69 |
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Conference Information | |
Committee | EID |
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Conference Date | 1995/10/24(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Electronic Information Displays (EID) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Field Emission Behavior of Diamond-like Carbon Films |
Sub Title (in English) | |
Keyword(1) | Field emission behavior |
Keyword(2) | Diamond-like carbon film |
Keyword(3) | plasma CVD |
Keyword(4) | Nitrogenated diamond-like carbon film |
1st Author's Name | Kwang-Ryeol Lee |
1st Author's Affiliation | Division of Ceramics, KIST() |
2nd Author's Name | Kwang Yong Eun |
2nd Author's Affiliation | Division of Ceramics, KIST |
3rd Author's Name | Bokeon Jeong |
3rd Author's Affiliation | Department of Physics, Myongji University |
4th Author's Name | Dong-Ryul Jeon |
4th Author's Affiliation | Department of Physics, Myongji University |
Date | 1995/10/24 |
Paper # | EID95-69 |
Volume (vol) | vol.95 |
Number (no) | 336 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |