| Presentation | 1995/10/24 Deposition of Hydrogen-Free Diamond-Like Carbon Film and Its Application to Field Emission Devices Kyu Chang Park, Jong Hyun Moon, Jin Jang, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Hydrogen-free Diamond-Like Carbon (DLC) films were deposited by layer-by-layer technique using plasma enhanced chemical vapor deposition, i.e., deposition of thin DLC layer and subsequent CF_4 plasma exposure on its surface alternatively. The hydrogen-free DLC film could be grown at 20O sec CF_4 plasma exposure on 5 nm DLC layer. The layer-by-layer deposited, hydrogen-free DLC film shows an efficient electron emission; the onset field emission was found to be 18 V/μm and a barrier energy for emission to be 0.06 eV. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hydrogen-free DLC / Layer-by-layer deposition / Field Emission |
| Paper # | EID95-68 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deposition of Hydrogen-Free Diamond-Like Carbon Film and Its Application to Field Emission Devices |
| Sub Title (in English) | |
| Keyword(1) | Hydrogen-free DLC |
| Keyword(2) | Layer-by-layer deposition |
| Keyword(3) | Field Emission |
| 1st Author's Name | Kyu Chang Park |
| 1st Author's Affiliation | Department of physics Kyung Hee University() |
| 2nd Author's Name | Jong Hyun Moon |
| 2nd Author's Affiliation | Department of physics Kyung Hee University |
| 3rd Author's Name | Jin Jang |
| 3rd Author's Affiliation | Department of physics Kyung Hee University |
| Date | 1995/10/24 |
| Paper # | EID95-68 |
| Volume (vol) | vol.95 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |