Presentation 1995/10/24
Fabrication and Characterization of Strip-shaped Diamond Field Emitter Arrays
Seong-Jin Kim, Byeong Kwon Ju, Jae-Hoon Jung, Beom Soo Park, Young-Joon Baik, Sung-Kyoo Lim, Myung Hwan Oh,
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Abstract(in English) Strip-shaped diamond field emitter arrays were fabricated by using a transfer mold technique. V-grooves were formed on a single crystalline (100) silicon substrate by an orientation dependent etching(ODE) method. Diamond film was grown on V-grooved silicon substrate by chemical vapor deposition(CVD). Diamond field emitter arrays were formed by etching silicon substrates. I-V characteristics of the fabricated diamond field emitter arrays under 2 × 10^<-6> Torr showed very sharp turn- on characteristics. It is found from experiment that the transfer mold technique can be used for the fabrication of diamond field emitter arrays. It may be possible to use the strip-shaped diamond field emitter arrays for the field emission display(FED) applications.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Diamond / Mold / Field emitter arrays / ODE / FED
Paper # EID95-64
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Conference Date 1995/10/24(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and Characterization of Strip-shaped Diamond Field Emitter Arrays
Sub Title (in English)
Keyword(1) Diamond
Keyword(2) Mold
Keyword(3) Field emitter arrays
Keyword(4) ODE
Keyword(5) FED
1st Author's Name Seong-Jin Kim
1st Author's Affiliation Division of Electronics and Information Technology, KIST()
2nd Author's Name Byeong Kwon Ju
2nd Author's Affiliation Division of Electronics and Information Technology, KIST
3rd Author's Name Jae-Hoon Jung
3rd Author's Affiliation Division of Electronics and Information Technology, KIST
4th Author's Name Beom Soo Park
4th Author's Affiliation Division of Ceramics, KIST
5th Author's Name Young-Joon Baik
5th Author's Affiliation Division of Ceramics, KIST
6th Author's Name Sung-Kyoo Lim
6th Author's Affiliation Department of Electronics Engineering, Dankook University
7th Author's Name Myung Hwan Oh
7th Author's Affiliation Division of Electronics and Information Technology, KIST
Date 1995/10/24
Paper # EID95-64
Volume (vol) vol.95
Number (no) 336
Page pp.pp.-
#Pages 5
Date of Issue