| Presentation | 1995/10/24 Fabrication and Characterization of Silicon Field Emission Cathodes using Spin-on-Glass Etch-back Process Jin Ho Lee, Sung Weon Kang, Min Park, Jong Moon Park, Sang Gi Kim, Hee Tae Lee, Kyoung Ik Cho, Hyung Joun Yoo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated and characterized silicon field emitter tip arrays by gate etch-back process. A very sharp tip of 1.1μm height was obtained by two step dry etching process and sharpening oxidation process. Polysilicon was deposited for gate electrodes and spin-on-glass was coated for planarization. After polysilicon etching by dry methods and dipping in buffered HF solution, we obtained a very sharp tip array. While this process is very simple and stable, the device has smaller gap space between the tip and the gate electrode and lower leakage currents than those fabricated by a conventional e-beam evaporated method. The resulting device has been observed by SEM and has been tested in ultrahigh vacuum (< 5x10^<-7> Torr) testing chamber. The measured emission current was 10.9 μA at 85V in 256 tip array. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | field emitter / SOG / cathode / Si / FED / vacuum microelectronics / etchback |
| Paper # | EID95-63 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and Characterization of Silicon Field Emission Cathodes using Spin-on-Glass Etch-back Process |
| Sub Title (in English) | |
| Keyword(1) | field emitter |
| Keyword(2) | SOG |
| Keyword(3) | cathode |
| Keyword(4) | Si |
| Keyword(5) | FED |
| Keyword(6) | vacuum microelectronics |
| Keyword(7) | etchback |
| 1st Author's Name | Jin Ho Lee |
| 1st Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute() |
| 2nd Author's Name | Sung Weon Kang |
| 2nd Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| 3rd Author's Name | Min Park |
| 3rd Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| 4th Author's Name | Jong Moon Park |
| 4th Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| 5th Author's Name | Sang Gi Kim |
| 5th Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| 6th Author's Name | Hee Tae Lee |
| 6th Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| 7th Author's Name | Kyoung Ik Cho |
| 7th Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| 8th Author's Name | Hyung Joun Yoo |
| 8th Author's Affiliation | Semiconductor Div., Electronics and Telecommunications Research Institute |
| Date | 1995/10/24 |
| Paper # | EID95-63 |
| Volume (vol) | vol.95 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |