| Presentation | 1995/10/24 Improved method for optimisation of design parameters of a field emitter array In-Jae Chung, In-Byeong Kang, A. Hariz, M.R. Haskard, Myung-Hwan Oh, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The effect of geometry changes on the field enhancement factor(β) of the field emitter was investigated for the optimum setting of design parameters. For the analysis, a three dimensional field emission simulator and Taguchi statistical methods were used. Unlike the previous reports, there does not exist strong dependence between β and the microtip radius(r). The geometrical changes that produces the greatest effect are the gate to microtip distance(d), cone half angle(θ), vertical tip height(h), and radius(r) in that order. The S/N(signal to noise) ratio results indicate that with design parameter values of as r = 30 nm, d=0.7 nm,θ=20-35, and h=1-1.5μm results in a stable design one with minimum sensitivity to process variations. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Field Emitter / Field Enhancement Factor / Taguchi method |
| Paper # | EID95-62 |
| Date of Issue |
| Conference Information | |
| Committee | EID |
|---|---|
| Conference Date | 1995/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improved method for optimisation of design parameters of a field emitter array |
| Sub Title (in English) | |
| Keyword(1) | Field Emitter |
| Keyword(2) | Field Enhancement Factor |
| Keyword(3) | Taguchi method |
| 1st Author's Name | In-Jae Chung |
| 1st Author's Affiliation | Microelectronics Centre, School of Electronic Eng, The Levels University of South Australia() |
| 2nd Author's Name | In-Byeong Kang |
| 2nd Author's Affiliation | Microelectronics Centre, School of Electronic Eng, The Levels University of South Australia |
| 3rd Author's Name | A. Hariz |
| 3rd Author's Affiliation | Microelectronics Centre, School of Electronic Eng, The Levels University of South Australia |
| 4th Author's Name | M.R. Haskard |
| 4th Author's Affiliation | Microelectronics Centre, School of Electronic Eng, The Levels University of South Australia |
| 5th Author's Name | Myung-Hwan Oh |
| 5th Author's Affiliation | Electron Devices Research Centre, Korea Institute of Science and Technology( KIST ) |
| Date | 1995/10/24 |
| Paper # | EID95-62 |
| Volume (vol) | vol.95 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |