| Presentation | 1995/10/24 Field Emission from Silicon Tips Coated with Diamond-like Carbon Sanjo Lee, Bokeon Chung, Hunsuk Cho, Sunup Lee, D. Jeon, Sungwon Leet, Kwang-Ryeol Lee, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have coated the silicon field emission tips with diamond-like carbon(DLC). The array of tips was made of n-type silicon using conventional dry etch. Before DLC coating, the tips were bombarded with argon ion to clean the surface. We found that this bombardment improved the aspect ratio of the tips and the DLC adhesion to the silicon tips. The DLC film was coated using r.f. plasma assisted-CVD using C_6H_6 gas. Initially, the end of the tips was coated with ball-shape DLC. The current-voltage curve was measured in 10^<-6> Torr pressure. The DLC-coated tips emitted current at lower onset voltage than as-prepared silicon tips. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | field emission array / diamond-like carbon, / flat panel display, / silicon field emitter |
| Paper # | EID95-61 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 1995/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Field Emission from Silicon Tips Coated with Diamond-like Carbon |
| Sub Title (in English) | |
| Keyword(1) | field emission array |
| Keyword(2) | diamond-like carbon, |
| Keyword(3) | flat panel display, |
| Keyword(4) | silicon field emitter |
| 1st Author's Name | Sanjo Lee |
| 1st Author's Affiliation | Myong Ji University, Department of Physics() |
| 2nd Author's Name | Bokeon Chung |
| 2nd Author's Affiliation | Myong Ji University, Department of Physics |
| 3rd Author's Name | Hunsuk Cho |
| 3rd Author's Affiliation | Myong Ji University, Department of Physics |
| 4th Author's Name | Sunup Lee |
| 4th Author's Affiliation | Myong Ji University, Department of Physics |
| 5th Author's Name | D. Jeon |
| 5th Author's Affiliation | Myong Ji University, Department of Physics |
| 6th Author's Name | Sungwon Leet |
| 6th Author's Affiliation | Myong Ji University, Department of Physics : Division of Ceramics, KIST |
| 7th Author's Name | Kwang-Ryeol Lee |
| 7th Author's Affiliation | Division of Ceramics, KIST |
| Date | 1995/10/24 |
| Paper # | EID95-61 |
| Volume (vol) | vol.95 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |