Presentation 1999/2/5
SH-SAW resonator and its application on sensing of ionic solution
Masayuki UCHIYAMA, Atsushi SAITOH, Takakazu KAMIYAMA, Tooru NOMURA,
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Abstract(in English) Since the energy of the surface acoustic wave (SAW) is confined largely to a zone at the surface approximately one acoustic wavelength thick, the waves are easy reflected by small perturbations on the surface. By using the phenomena, the SAW resonator having narrower bandwidths and higher Q-value is obtained. In this paper, resonators utilizing shear horizontal mode SAW (SH-SAW) have been used for sensing in ionic liquid properties. Two-port SH-SAW sensor was fabricated on 36° YX LiTaO_3 substrate and used as a sensing element of the liquid flow system. Experimental results show that the resonance frequency varied with the conductivity of the ionic solution. Especially, it was found that the SH-SAW resonator is very suitable for detecting element of the liquid flow system.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SAW / SH-mode / SAW resonator / flow system / ionic solution
Paper # OEM98-129
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Committee OME
Conference Date 1999/2/5(1days)
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Paper Information
Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) SH-SAW resonator and its application on sensing of ionic solution
Sub Title (in English)
Keyword(1) SAW
Keyword(2) SH-mode
Keyword(3) SAW resonator
Keyword(4) flow system
Keyword(5) ionic solution
1st Author's Name Masayuki UCHIYAMA
1st Author's Affiliation Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology()
2nd Author's Name Atsushi SAITOH
2nd Author's Affiliation Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology
3rd Author's Name Takakazu KAMIYAMA
3rd Author's Affiliation Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology
4th Author's Name Tooru NOMURA
4th Author's Affiliation Department of Communication Engineering, Faculty of Engineering, Shibaura Institute of Technology
Date 1999/2/5
Paper # OEM98-129
Volume (vol) vol.98
Number (no) 580
Page pp.pp.-
#Pages 6
Date of Issue