| Presentation | 1998/7/24 Effect of SOG(Spin on Glass)on formation of PbZr_0.52Ti_0.48O_3 for Metal-Ferroelectric-Insulator-Semiconductor(MFIS) structure Yeon-Hwa Choi, Chul-Ju Kim, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed SOG as the buffer layer for MFIS structure and investigated the effect of SOG on formation of PZT.The formed PZT on SOG had a smooth surface morphology and the perovskite phase though the annealing temperature of PZT was low as the 450℃ and the crystalline property of SOG was amorphous.The electric characteristics of MFIS structure with Pt/PZT/SOG/Si were obtained the memory window in the capacitance-voltage curve was about 2.5V and the leakage current density was measured below 5×10^-7A/cm^2 at 15V(500kV/cm).And the P-E characteristics of PZT/SOG capacitors were so good. P_r and E_c were 26μC/cm^2 and 60kV/cm, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PZT / MFIS structure / buffer layer / SOG / planarization / low temperature process |
| Paper # | SDM98-102,ICD98-101 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 1998/7/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | KOR |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of SOG(Spin on Glass)on formation of PbZr_0.52Ti_0.48O_3 for Metal-Ferroelectric-Insulator-Semiconductor(MFIS) structure |
| Sub Title (in English) | |
| Keyword(1) | PZT |
| Keyword(2) | MFIS structure |
| Keyword(3) | buffer layer |
| Keyword(4) | SOG |
| Keyword(5) | planarization |
| Keyword(6) | low temperature process |
| 1st Author's Name | Yeon-Hwa Choi |
| 1st Author's Affiliation | Dept.of Electronic Engineering, The University of Seoul() |
| 2nd Author's Name | Chul-Ju Kim |
| 2nd Author's Affiliation | Dept.of Electronic Engineering, The University of Seoul |
| Date | 1998/7/24 |
| Paper # | SDM98-102,ICD98-101 |
| Volume (vol) | vol.98 |
| Number (no) | 194 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |