| Presentation | 2002/5/16 Performance of UV-LED grown on A1_xGa_1-xN with low-dislocation density Shun TAKANAMI, Atsushi MIYAZAKI, Shinji TERAO, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To realize high efficiency UV light emitting devices, thick AlGaN films with high-AlN molar fraction and high-crystalline quality are essential. Then, we propose the hetero-ELO growth. It comprises a first selective growth of GaN triangular-shape seed crystal through periodic SiO_2 stripe masks and a second lateral growth of u-AlGaN layer through a low-temperature-deposited AlN interlayer. This technique resulted in the dislocation density of as low as mid-10^7cm^-2 whole wafer. UV-LED with an emission wavelength of 363nm and output power of 2.6mW at 100mA was successfully fabricated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | low-dislocation density Al_xGa_1-xN / hetero-ELO / UV-LED |
| Paper # | CPM2002-22 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/5/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Performance of UV-LED grown on A1_xGa_1-xN with low-dislocation density |
| Sub Title (in English) | |
| Keyword(1) | low-dislocation density Al_xGa_1-xN |
| Keyword(2) | hetero-ELO |
| Keyword(3) | UV-LED |
| 1st Author's Name | Shun TAKANAMI |
| 1st Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University() |
| 2nd Author's Name | Atsushi MIYAZAKI |
| 2nd Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University |
| 3rd Author's Name | Shinji TERAO |
| 3rd Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University |
| 4th Author's Name | Motoaki IWAYA |
| 4th Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University |
| 5th Author's Name | Satoshi KAMIYAMA |
| 5th Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University |
| 6th Author's Name | Hiroshi AMANO |
| 6th Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University |
| 7th Author's Name | Isamu AKASAKI |
| 7th Author's Affiliation | High-Tech Research Center, Faculty of Science and Technology, Meijo University |
| Date | 2002/5/16 |
| Paper # | CPM2002-22 |
| Volume (vol) | vol.102 |
| Number (no) | 76 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |