| Presentation | 1994/5/19 Fabrication of New-Type Semiconductors Development of New Ion Beam Technology:Combined Ion Beam and Molecular Beam Epitaxy(CIBMBE) Method Yunosuke Makita, Hajime Shibata, Akimasa Yamada, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A novel method was developed in which molecular beam epitaxy(MBE) can be carried out under the simultaneous irradiation of low- energy mass-separated ion beam carbon and nitrogen doping was accomplished for GaAs,AlGaAs and InGaAs with a wide range of impurity concentration.This method was proposed to be used for the fabrication of thermally non-equilibrium semiconductors such as SiGeC. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | low-energy mass-separated ion beam / molecular beam epitaxy(MBE) / non-equilibrium semiconductors |
| Paper # | CPM94-6 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1994/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of New-Type Semiconductors Development of New Ion Beam Technology:Combined Ion Beam and Molecular Beam Epitaxy(CIBMBE) Method |
| Sub Title (in English) | |
| Keyword(1) | low-energy mass-separated ion beam |
| Keyword(2) | molecular beam epitaxy(MBE) |
| Keyword(3) | non-equilibrium semiconductors |
| 1st Author's Name | Yunosuke Makita |
| 1st Author's Affiliation | Electrotechnical laboratory() |
| 2nd Author's Name | Hajime Shibata |
| 2nd Author's Affiliation | Electrotechnical laboratory |
| 3rd Author's Name | Akimasa Yamada |
| 3rd Author's Affiliation | Electrotechnical laboratory |
| Date | 1994/5/19 |
| Paper # | CPM94-6 |
| Volume (vol) | vol.94 |
| Number (no) | 39 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |