Presentation | 1994/5/19 Total reflection X-ray fluorescence analysis for ultratrace surface contamination Kunihiro Miyazaki, Ayako Shimazaki, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Recently,TRXRF analysis has been developed as a practical in- line heavy metal contamination monitoring method during the ULSI device fabrication process.With the progress of the ULSI device, further improvement of the detection sensitivity would be required. And the detection capability of light-elements such as sodium and aluminum which are also notable elements for the monitoring would be also required.In this paper,a new approach to TRXRF analysis of light elements and heavy metals simultaneously with high detection sensitivity by concentration method using silicon wafer with sputtered carbon film is introduced.And an also new approach,VPT is introduced,which is preparation method for high sensitivity in- line analysis. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | TRXRF / Vapor Phase Decomposition / Vapor Phase Treatment |
Paper # | CPM94-2 |
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Conference Information | |
Committee | CPM |
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Conference Date | 1994/5/19(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Total reflection X-ray fluorescence analysis for ultratrace surface contamination |
Sub Title (in English) | |
Keyword(1) | TRXRF |
Keyword(2) | Vapor Phase Decomposition |
Keyword(3) | Vapor Phase Treatment |
1st Author's Name | Kunihiro Miyazaki |
1st Author's Affiliation | Semiconductor group,Toshiba() |
2nd Author's Name | Ayako Shimazaki |
2nd Author's Affiliation | Semiconductor group,Toshiba |
Date | 1994/5/19 |
Paper # | CPM94-2 |
Volume (vol) | vol.94 |
Number (no) | 39 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |