| Presentation | 2001/12/13 EB / FIB INtegrated Test System Koji NAKAMAE, Hiromu FUJIOKA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The test system that integrate the electron beam (EB) test system and the focused ion beam(FIB)processing and repair system is introduced. This integrated system allows us to cary out a series of fault diagnosis (fault localization), fault repair and in-situ repair verification processes efficiently. The EB tester diagnoses or localizes the fault detected by an LSI tester. The FIB processing and repair system repairs the fault and verifies the repair in-situ. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Electron Beam test system / Focused ion beam processing and repair system / Fault tracing / CAD layout data / Circuit repair / Verificatione |
| Paper # | CPM-115,ICD-167 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2001/12/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | EB / FIB INtegrated Test System |
| Sub Title (in English) | |
| Keyword(1) | Electron Beam test system |
| Keyword(2) | Focused ion beam processing and repair system |
| Keyword(3) | Fault tracing |
| Keyword(4) | CAD layout data |
| Keyword(5) | Circuit repair |
| Keyword(6) | Verificatione |
| 1st Author's Name | Koji NAKAMAE |
| 1st Author's Affiliation | Graduate School of Engineering Osaka University() |
| 2nd Author's Name | Hiromu FUJIOKA |
| 2nd Author's Affiliation | Graduate School of Engineering Osaka University |
| Date | 2001/12/13 |
| Paper # | CPM-115,ICD-167 |
| Volume (vol) | vol.101 |
| Number (no) | 518 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |