Presentation | 2001/10/19 Micro Optical Mounting Technique : High-resolution encoder and micro blood flowmeter Eiji HIGURASHI, Renshi SAWADA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed an optical passive algnment technique using alignment marks for hybrid integration. The hybrid integration of various optical components(laser diode, photodiode, grating, etc)on a silicon substrate(surface mounting)enables us to construct highly functional, reliable, and low-cost micro-sensors. Using this technique, several micro-sensors, including a high-resolution encoder that can measure the displacement or revolution angle, and a blood flowmeter that can monitor blood flow in human skin, have been developed. Because of their small size(2×3mm^2)with high performance, these sensors have a great potential for many industrial applications. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Passive alignment / Surface mounting / Hybrid integration / Micro-sensor / Encoder / Blood flowmeter |
Paper # | OME2001-88 |
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Committee | OME |
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Conference Date | 2001/10/19(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Micro Optical Mounting Technique : High-resolution encoder and micro blood flowmeter |
Sub Title (in English) | |
Keyword(1) | Passive alignment |
Keyword(2) | Surface mounting |
Keyword(3) | Hybrid integration |
Keyword(4) | Micro-sensor |
Keyword(5) | Encoder |
Keyword(6) | Blood flowmeter |
1st Author's Name | Eiji HIGURASHI |
1st Author's Affiliation | NTT Telecommunications Energy Laboratories() |
2nd Author's Name | Renshi SAWADA |
2nd Author's Affiliation | NTT Telecommunications Energy Laboratories |
Date | 2001/10/19 |
Paper # | OME2001-88 |
Volume (vol) | vol.101 |
Number (no) | 396 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |