Presentation 2001/10/19
Micro Optical Mounting Technique : High-resolution encoder and micro blood flowmeter
Eiji HIGURASHI, Renshi SAWADA,
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Abstract(in English) We have developed an optical passive algnment technique using alignment marks for hybrid integration. The hybrid integration of various optical components(laser diode, photodiode, grating, etc)on a silicon substrate(surface mounting)enables us to construct highly functional, reliable, and low-cost micro-sensors. Using this technique, several micro-sensors, including a high-resolution encoder that can measure the displacement or revolution angle, and a blood flowmeter that can monitor blood flow in human skin, have been developed. Because of their small size(2×3mm^2)with high performance, these sensors have a great potential for many industrial applications.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Passive alignment / Surface mounting / Hybrid integration / Micro-sensor / Encoder / Blood flowmeter
Paper # OME2001-88
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Committee OME
Conference Date 2001/10/19(1days)
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Paper Information
Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Micro Optical Mounting Technique : High-resolution encoder and micro blood flowmeter
Sub Title (in English)
Keyword(1) Passive alignment
Keyword(2) Surface mounting
Keyword(3) Hybrid integration
Keyword(4) Micro-sensor
Keyword(5) Encoder
Keyword(6) Blood flowmeter
1st Author's Name Eiji HIGURASHI
1st Author's Affiliation NTT Telecommunications Energy Laboratories()
2nd Author's Name Renshi SAWADA
2nd Author's Affiliation NTT Telecommunications Energy Laboratories
Date 2001/10/19
Paper # OME2001-88
Volume (vol) vol.101
Number (no) 396
Page pp.pp.-
#Pages 5
Date of Issue