Presentation 2000/9/15
Needle-Type Biosensor Fabricated with Semiconductor Process
Atsunori Hiratsuka, Ken-ichi Kojima, Hiroaki Suzuki, Hitoshi Muguruma, Kazunori Ikebukuro, Isao Karube,
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Abstract(in English) We report a needle-type biosensor with the novel process of fabrication, which was the basis of conventional semiconductor and micromachining process. The amperometric sensing electrode and thin-film Ag/AgCl reference electrode was directly integrated on the glass substrate with thin-film process (e. g. , sputtering). Enzyme was immobilized onto the electrode via plasma-polymerized film, which is deposited directly onto the substrate under dry process. The most advantage of the process facilitates low-cost and high-quality needle-type biosensors by the mass production.
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Keyword(in English) Needle-type biosensors / Glucose / Thin-film Ag/AgCl reference electrode / Plasma-polymerized film
Paper # ED2000-160,OME2000-113
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Committee OME
Conference Date 2000/9/15(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Needle-Type Biosensor Fabricated with Semiconductor Process
Sub Title (in English)
Keyword(1) Needle-type biosensors
Keyword(2) Glucose
Keyword(3) Thin-film Ag/AgCl reference electrode
Keyword(4) Plasma-polymerized film
1st Author's Name Atsunori Hiratsuka
1st Author's Affiliation Research Center for Advenced Science and Technology()
2nd Author's Name Ken-ichi Kojima
2nd Author's Affiliation Institute of Materials Science, University of Tsukuba
3rd Author's Name Hiroaki Suzuki
3rd Author's Affiliation Institute of Materials Science, University of Tsukuba
4th Author's Name Hitoshi Muguruma
4th Author's Affiliation Department of Electronic Engineering, Shibaura Institute of Technology
5th Author's Name Kazunori Ikebukuro
5th Author's Affiliation Research Center for Advenced Science and Technology
6th Author's Name Isao Karube
6th Author's Affiliation Research Center for Advenced Science and Technology
Date 2000/9/15
Paper # ED2000-160,OME2000-113
Volume (vol) vol.100
Number (no) 319
Page pp.pp.-
#Pages 6
Date of Issue