Presentation 2000/9/15
Metal Patterning on Organopolysilane-Coated Films by Electroless Deposition Study of Multi-layered Metal Pattern.
Eiichi TABEI, Motoo FUKUSHIMA, Yoshitaka HAMADA, Mikio ARAMATA,
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Abstract(in English) Palladium colloid was formed by the reductivity of polysilane, when a palladium salt solution was contacted to the polysilane film. It was possible to make metallic nickel and copper on the polysilane film by electroless deposition using palladium colloid as a catalyst. Metal pattern of 1 μm level can be made by using the micro stamp method in addition to slectroless deposition. In this study, it was found that UV-irradiation to polysilane film was effective for adhesion between metal and baseboard, which is very important toward practical application of multilayered metal patterning.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Polysilane / Electroless deposition / Metal patterning / UV-irradiation
Paper # ED2000-157,OME2000-110
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Committee OME
Conference Date 2000/9/15(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Metal Patterning on Organopolysilane-Coated Films by Electroless Deposition Study of Multi-layered Metal Pattern.
Sub Title (in English)
Keyword(1) Polysilane
Keyword(2) Electroless deposition
Keyword(3) Metal patterning
Keyword(4) UV-irradiation
1st Author's Name Eiichi TABEI
1st Author's Affiliation Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co. , Ltd.()
2nd Author's Name Motoo FUKUSHIMA
2nd Author's Affiliation Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co. , Ltd.
3rd Author's Name Yoshitaka HAMADA
3rd Author's Affiliation Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co. , Ltd.
4th Author's Name Mikio ARAMATA
4th Author's Affiliation Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co. , Ltd.
Date 2000/9/15
Paper # ED2000-157,OME2000-110
Volume (vol) vol.100
Number (no) 319
Page pp.pp.-
#Pages 5
Date of Issue