| Presentation | 2000/6/30 Development of Scanning Displacement Current Microscopy Atsushi Okuda, Setsuri Uehara, Tomohiko Masuda, Yutaka Majima, Mitsumasa Iwamoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a scanning displacement current microscopy (SDM) which measures the displacement current image induced by changes in capacitance between a probe and sample. In the developed SDM, displacement current image and tunneling current image can be measured simultaneously. It is possible to characterize semiconductor impurity dopant profile absolutely. In this report, we show a successful SDM image of a grating sample, and analyze the resolution of the displacement current image. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Scanning Probe Microscopy / displacement current / tunneling current / dopant profile |
| Paper # | US2000-25,EMD2000-21,CPM2000-36,OME2000-31 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2000/6/30(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Scanning Displacement Current Microscopy |
| Sub Title (in English) | |
| Keyword(1) | Scanning Probe Microscopy |
| Keyword(2) | displacement current |
| Keyword(3) | tunneling current |
| Keyword(4) | dopant profile |
| 1st Author's Name | Atsushi Okuda |
| 1st Author's Affiliation | Department of Physical Electronics, Tokyo Institute of Technology() |
| 2nd Author's Name | Setsuri Uehara |
| 2nd Author's Affiliation | Department of Physical Electronics, Tokyo Institute of Technology |
| 3rd Author's Name | Tomohiko Masuda |
| 3rd Author's Affiliation | Department of Physical Electronics, Tokyo Institute of Technology |
| 4th Author's Name | Yutaka Majima |
| 4th Author's Affiliation | Department of Physical Electronics, Tokyo Institute of Technology |
| 5th Author's Name | Mitsumasa Iwamoto |
| 5th Author's Affiliation | Department of Physical Electronics, Tokyo Institute of Technology |
| Date | 2000/6/30 |
| Paper # | US2000-25,EMD2000-21,CPM2000-36,OME2000-31 |
| Volume (vol) | vol.100 |
| Number (no) | 167 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |